Photolithography: An Efficient and Low‐Cost Photolithographic‐Pattern‐Transfer Technique to Fabricate Electrode Arrays for Micro‐/Nanoelectronics (Adv. Mater. Technol. 1/2016)

Zhongming Wei, Jingbo Li and co-workers propose, in article 1600001, a novel and low-cost technique for fabricating electrode arrays of micro-/nanoelectronics via photolithographic pattern transfer. This practical and universal method could be widely and reliably used for making different electrode arrays of (opto)electronics based on 2D materials or other semiconductors for the fabrication of complex devices including top-gate field-effect transistors, Hall bars, and heterostructured diodes.