Efficient Investigation of High‐Performance Perovskite Solar Cells Based on Shadow‐Mask Kits with Uniform Patterning and Antishadowing Capabilities

Abstract In recent years, there has been increased research and rapid development in perovskite solar cells. Uniformity, repeatability, and reliability of electrode patterns formed by shadow‐mask technologies are factors that play an important role in efficient experimental studies for achieving high‐throughput samples and high‐performance devices. In this study, some new principles of mask design are investigated to overcome the drawbacks of conventional mask. High precision patterns are obtained by fabricating shadow‐masks with stainless steel plates via a photochemical etching process. An assembly concept design is proposed for shadow‐mask kits to improve versatility and avoid edge chamfer. The highly accurate active area and precise replication of the aperture patterns are obtained by improving the alignment between the samples and the mask patterns. The perovskite solar cell arrays are fabricated on a single substrate and a uniform performance is achieved due to the balanced distribution of electrodes. Thin shadow‐masks with smooth surfaces are employed to diminish the shadowing effect and a power conversion efficiency of 20.85% with a high fill factor of 81.6% is obtained in an inverted perovskite solar cell. The versatility and high quality of our shadow‐mask kits can further promote research in the area of thin‐film and photovoltaic technologies.