Room‐Temperature Printing of Ultrathin Quasi‐2D GaN Semiconductor via Liquid Metal Gallium Surface Confined Nitridation Reaction
Source abstract
Abstract
Abstract Outstanding wide‐bandgap semiconductor material such as gallium nitride (GaN) has been extensively utilized in power electronics, radiofrequency amplifiers, and harsh environment devices. Due to its quantum confinement effect in enabling desired deep‐ultraviolet emission, excitonic impact, and electronic transport features, 2D or ultrathin quasi‐2D GaN semiconductors have been one of the most remarkable candidates for future growth of microelectronic devices. Here, for the first time, the authors report a large area, wide bandgap, and room‐temperature quasi‐2D GaN synthesis and printing strategy through introducing the plasma medicated liquid metal gallium surface‐confined nitridation reaction mechanism. The developed direct fabrication and compositional process is consistent with various electronics manufacturing approaches and thus opens an easy going way for cost‐effective growth of the third‐generation semiconductor. In particular, the fully printed field‐effect transistors relying on the GaN thus made show p‐type switching with an on/off ratio greater than 105, maximum field‐effect hole mobility of 53 cm2 V−1 s−1, and a small sub‐threshold swing. As demonstrated, the present method allows to produce at room temperature the GaN with thickness spanning from 1 nanometer to nanometers. This basic method can be further extended, generalized, and utilized for making various electronic and photoelectronic devices in the coming time.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: GaN-based semiconductor devices and materials · 2D Materials and Applications · Ga2O3 and related materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Beijing Key Lab of Cryo‐Biomedical Engineering and Key Lab of Cryogenics Technical Institute of Physics and Chemistry Chinese Academy of Sciences Beijing 100190 P. R. China
School of Engineering Science University of Chinese Academy of Sciences Beijing 100190 P. R. China
State Key Laboratory of Laser Propulsion and Application Space Engineering University Beijing 101416 P. R. China
Department of Biomedical Engineering School of Medicine Tsinghua University Beijing 100084 P. R. China
Funding
National Natural Science Foundation of China
References (48)
Show source-provided references
1. 10.1021/acs.nanolett.7b0300310.1021/acs.nanolett.7b03003 ↗
2. 10.1016/j.jcrysgro.2015.07.03010.1016/j.jcrysgro.2015.07.030 ↗
3. 10.1039/C9CY00329K10.1039/C9CY00329K ↗
4. 10.1016/j.matchemphys.2018.05.06310.1016/j.matchemphys.2018.05.063 ↗
5. 10.1109/23.90377210.1109/23.903772 ↗
6. 10.1016/j.commatsci.2016.02.01210.1016/j.commatsci.2016.02.012 ↗
7. 10.1016/j.vacuum.2020.10969410.1016/j.vacuum.2020.109694 ↗
8. 10.1021/acs.nanolett.6b0122510.1021/acs.nanolett.6b01225 ↗
9. 10.1103/RevModPhys.87.113910.1103/RevModPhys.87.1139 ↗
10. 10.1002/pssb.20104649410.1002/pssb.201046494 ↗
11. 10.1007/s11433-012-4674-010.1007/s11433-012-4674-0 ↗
12. 10.1021/jp994308s10.1021/jp994308s ↗
13. 10.1039/C8NR05626A10.1039/C8NR05626A ↗
14. 10.1021/jacs.8b1148310.1021/jacs.8b11483 ↗
15. 10.1021/jacs.8b0835110.1021/jacs.8b08351 ↗
16. 10.1038/nmat474210.1038/nmat4742 ↗
17. 10.1002/cphc.20190021210.1002/cphc.201900212 ↗
18. 10.1021/acsami.1c1297310.1021/acsami.1c12973 ↗
19. 10.1038/nnano.2015.30510.1038/nnano.2015.305 ↗
20. 10.1103/PhysRevB.54.1116910.1103/PhysRevB.54.11169 ↗
21. 10.1063/1.218700610.1063/1.2187006 ↗
22. 10.1103/PhysRevB.50.1795310.1103/PhysRevB.50.17953 ↗
23. 10.1063/1.481232310.1063/1.4812323 ↗
24. 10.1063/1.156406010.1063/1.1564060 ↗
25. 10.1002/smll.20180299510.1002/smll.201802995 ↗
26. 10.1038/nmat474210.1038/nmat4742 ↗
27. 10.1038/s41928-021-00611-y10.1038/s41928-021-00611-y ↗
28. 10.7567/APEX.9.12100110.7567/APEX.9.121001 ↗
29. 10.1038/srep2368310.1038/srep23683 ↗
30. 10.1109/LED.2017.277944510.1109/LED.2017.2779445 ↗
31. 10.1109/LED.2016.261650810.1109/LED.2016.2616508 ↗
32. 10.1016/j.jallcom.2019.07.10810.1016/j.jallcom.2019.07.108 ↗
33. 10.1039/C6TC02137A10.1039/C6TC02137A ↗
34. 10.1016/j.apsusc.2018.02.04910.1016/j.apsusc.2018.02.049 ↗
35. 10.1039/C7TC00574A10.1039/C7TC00574A ↗
36. 10.1021/acsami.9b1446210.1021/acsami.9b14462 ↗
37. 10.1186/s11671-018-2680-510.1186/s11671-018-2680-5 ↗
38. 10.1039/C7TC04810F10.1039/C7TC04810F ↗
39. 10.1109/LED.2019.294776210.1109/LED.2019.2947762 ↗
40. 10.1002/adma.20150256910.1002/adma.201502569 ↗
41. 10.1109/LED.2019.291028610.1109/LED.2019.2910286 ↗
42. 10.1088/1361-6463/ab6ea010.1088/1361-6463/ab6ea0 ↗
43. 10.1063/5.000315310.1063/5.0003153 ↗
44. 10.1109/TED.2020.296995810.1109/TED.2020.2969958 ↗
45. 10.1016/j.apsusc.2018.06.00510.1016/j.apsusc.2018.06.005 ↗
46. 10.1002/admi.20200113110.1002/admi.202001131 ↗
47. 10.1002/adma.20200573210.1002/adma.202005732 ↗
48. 10.1021/acsnano.5b0134110.1021/acsnano.5b01341 ↗