Ultrahigh Performance On‐Chip Single Crystal Diamond NEMS/MEMS with Electrically Tailored Self‐Sensing Enhancing Actuation

Abstract All‐electrical nano‐electromechanical or micro‐electromechanical systems (NEMS/MEMS) with integrated sensing and actuation are essential to fulfill the functionalities of single‐crystal diamond (SCD) NEMS/MEMS by integrated circuits for sensors or quantum systems. However, the implementation of all‐electrical on‐chip SCD NEMS/MEMS transducers has encountered bottlenecks due to the lack of shallow dopants in diamond and the difficulty of integrating active materials on diamond. In the present work, an on‐chip SCD NEMS/MEMS with unprecedented figure‐of‐merits is demonstrated by proposing a self‐sensing enhancing actuation scheme to circumvent the bottlenecks in diamond. The on‐chip SCD NEMS/MEMS show high self‐sensitivity, low actuation voltage, little energy dissipation, and high‐frequency and high‐temperature operation (873 K). The present work provides a platform for the development of ultrahigh‐performance and robust SCD NEMS/MEMS in sensors and quantum science fields, superior to other semiconductors.