Synthesis of Wafer‐Scale Graphene with Chemical Vapor Deposition for Electronic Device Applications
Source abstract
Abstract
Abstract The first isolation of graphene opens the avenue for new platforms for physics, electronic engineering, and materials sciences. Among several kinds of synthesis approaches, chemical vapor deposition is most promising for the growth at wafer‐scale, which is compatible with the Si‐based electronic device integration protocols. In this review, the types, properties, and synthesis methods of graphene are first introduced. Many details of wafer‐scale graphene synthesis by chemical vapor deposition strategies are given, including the wafer‐scale single crystal metal and alloy preparation, roll to roll synthesis over Cu, roll to roll electrochemical transfer technique. Besides, the batch‐to‐batch synthesis are highlighted for direct graphene over dielectric substrates such as sapphire and Si/SiO2. The electronic transport and transparent conductance of the wafer‐scale graphene are compared with high‐quality single crystal. The progress and proof‐of‐the‐concept are briefly recalled in graphene‐based electronics such as transistors, sensors, integrated circuits, and spin transport valves. Eventually, the readers are provoked with the current challenges as well as the future opportunities.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Graphene research and applications · Molecular Junctions and Nanostructures · Nanowire Synthesis and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Collaborative Innovation Center of Technology and Equipment for Biological Diagnosis and Therapy in Universities of Shandong Institute for Advanced Interdisciplinary Research (iAIR) University of Jinan Jinan Shandong 250022 China
College of Biological Sciences and Technology University of Jinan Jinan Shandong 250022 China
School of Chemistry and Chemical Engineering University of Jinan Jinan Shandong 250022 China
Institute for Materials Science and Max Bergmann Center of Biomaterials TU Dresden Dresden 01069 Germany
Center for Advancing Electronics Dresden TU Dresden 01069 Dresden Germany
School of Information Science and Engineering University of Jinan Jinan Shandong 250022 China
School of Materials Science and Engineering University of Jinan Jinan 250022 China
State Key Laboratory of Crystal Materials Center of Bio & Micro/Nano Functional Materials Shandong University 27 Shandanan Road Jinan 250100 China
Institute of Marine Science and Technology Shandong University Qingdao Shandong 266237 China
Funding
National Basic Research Program of China · National Natural Science Foundation of China · Natural Science Foundation of Shandong Province
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