Flexible Wide Bandgap Electrode System for In situ Cell Sensing and Irreversible Electroporation

ABSTRACT Flexible bioelectronic interfaces are transforming biomedical engineering by integrating electronic systems with soft biological tissues for in situ cell sensing and targeted therapy. Wide‐bandgap semiconductors have emerged as promising materials due to their inherent biocompatibility, mechanical robustness, and stable semiconducting properties. We recently grew thin single‐crystalline silicon carbide, a promising wide‐bandgap material for bioelectronics, on silicon substrates. Nano‐thin silicon carbide brings exciting new prospects to precise in‐body therapeutics. However, the degradation of materials working in relatively corrosive environments of biofluids, especially with the application of electrical currents, presents a major challenge. In this study, we demonstrate the design, wafer‐scale microfabrication process, and evaluation of a flexible cubic silicon carbide (3C‐SiC) electrode system for cellular bioelectrical sensing and irreversible electroporation ablation of cancer cells. The electrode system exhibits excellent electrochemical stability and mechanical compliance in physiological environments, ensuring conformal contact with soft tissue. Electroporation procedures on MDA‐MB‐231 breast cancer cells demonstrated highly efficient cell lysis after a short application of monophasic current. Concurrently, the electrodes supported robust real‐time recording of cellular activity, confirming their capability for sensing‐and‐actuation integration. Our results indicate a promising potential of wide‐bandgap semiconductors for robust and multifunctional bioelectronic interfaces toward targeted theragnostic at cellular levels.