DataVXAdvanced Materials InterfacesPaper
journal article·2020-12Open access

Thin Films: Area‐Selective Growth of HfS2 Thin Films via Atomic Layer Deposition at Low Temperature (Adv. Mater. Interfaces 23/2020)

Yuanyuan Cao, Tobias Wähler, Hyoungwon Park, Johannes Will, Annemarie Prihoda, Narine Moses Badlyan, Lukas Fromm, Tadahiro Yokosawa, Bingzhe Wang, Dirk M. Guldi, Andreas Görling, Janina Maultzsch, Tobias Unruh, Erdmann Spiecker, Marcus Halik, Jörg Libuda, Julien Bachmann

Advanced Materials Interfaces· Volume 7· Issue 23
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Source abstract

Abstract

The 2D semiconductor hafnium sulfide, HfS2, is deposited for the first time using atomic layer deposition in mild conditions and at low temperature (100 °C). The surface reactions are specific and allow for area-selective deposition of high-quality thin films on self-assembled molecular monolayers. When properly protected from air, the material is pure, stoichiometric, and ordered on a short range as deposited. More details can be found in article number 2001493 by Julien Bachmann and co-workers.
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Research context

Electronic materialsMaterials processing

OpenAlex topics: Chalcogenide Semiconductor Thin Films · Quantum Dots Synthesis And Properties · Electronic and Structural Properties of Oxides

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Chemistry of Thin Film Materials (CTFM) Interdisciplinary Center of Nanostructured Films (IZNF) Friedrich Alexander University of Erlangen‐Nuremberg Cauerstr. 3 Erlangen 91058 Germany

Interface Research and Catalysis Erlangen Center for Interface Research and Catalysis (ECRC) Friedrich Alexander University of Erlangen‐Nuremberg Egerlandstr. 3 Erlangen 91058 Germany

Chair of Organic Materials and Devices (OMD) Friedrich Alexander University of Erlangen‐Nuremberg IZNF Cauerstr. 3 Erlangen 91058 Germany

Institute of Micro‐ and Nanostructure Research and Center for Nanoanalysis and Electron Microscopy (CENEM) Friedrich Alexander University of Erlangen‐Nuremberg IZNF Cauerstr. 3 Erlangen 91058 Germany

Institute for Crystallography and Structural Physics (ICSP) Friedrich Alexander University of Erlangen‐Nuremberg IZNF Staudtstr. 3 Erlangen 91058 Germany

Chair of Experimental Physics, Department of Physics Friedrich Alexander University of Erlangen‐Nuremberg Staudtstr. 7 Erlangen 91058 Germany

Chair of Theoretical Chemistry Department of Chemistry and Pharmacy Friedrich Alexander University of Erlangen‐Nuremberg Egerlandstr. 3 Erlangen 91058 Germany

Chair of Physical Chemistry I, Department of Chemistry and Pharmacy Friedrich Alexander University of Erlangen‐Nuremberg Egerlandstr. 3 Erlangen 91058 Germany

Institute of Chemistry Saint‐Petersburg State University Universitetskii pr. 26 St. Petersburg 198504 Russia

References

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