journal article·2019-11Open access

Wafer Bonding: Solution‐Processed‐ZnO‐Mediated Semiconductor Bonding with High Mechanical Stability, Electrical Conductivity, Optical Transparency, and Roughness Tolerance (Adv. Mater. Interfaces 22/2019)

Tatsushi Yamashita, Soichiro Hirata, Ryoichi Inoue, Kodai Kishibe, Katsuaki Tanabe

Advanced Materials Interfaces· Volume 6· Issue 22

Abstract

Semiconductor bonding mediated by a transparent conductive oxide, ZnO, prepared by a simple solution spin-on process, is developed. The ZnO synthesis, sintering, and bonding processes are realized in a single step. The ZnO-mediated bonds simultaneously exhibit high mechanical stability, electrical conductivity, optical transparency, and roughness tolerance. This efficient bonding scheme leads to a low-cost, high-performance optoelectronic device fabrication and integration. More details can be found in article number 1900921 by Tatsushi Yamashita, Katsuaki Tanabe, and co-workers.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: 3D IC and TSV technologies · Additive Manufacturing and 3D Printing Technologies · Nanomaterials and Printing Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Chemical Engineering Kyoto University Nishikyo Kyoto 615‐8510 Japan

References

Reference metadata was not supplied for this record.