Wafer Bonding: Solution‐Processed‐ZnO‐Mediated Semiconductor Bonding with High Mechanical Stability, Electrical Conductivity, Optical Transparency, and Roughness Tolerance (Adv. Mater. Interfaces 22/2019)
Source abstract
Abstract
Semiconductor bonding mediated by a transparent conductive oxide, ZnO, prepared by a simple solution spin-on process, is developed. The ZnO synthesis, sintering, and bonding processes are realized in a single step. The ZnO-mediated bonds simultaneously exhibit high mechanical stability, electrical conductivity, optical transparency, and roughness tolerance. This efficient bonding scheme leads to a low-cost, high-performance optoelectronic device fabrication and integration. More details can be found in article number 1900921 by Tatsushi Yamashita, Katsuaki Tanabe, and co-workers.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: 3D IC and TSV technologies · Additive Manufacturing and 3D Printing Technologies · Nanomaterials and Printing Technologies
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Affiliations
Department of Chemical Engineering Kyoto University Nishikyo Kyoto 615‐8510 Japan
References
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