DataVXAdvanced MaterialsPaper
journal article·2016-12Open access

Photonics: Toward Scalable Flexible Nanomanufacturing for Photonic Structures and Devices (Adv. Mater. 47/2016)

Wen Qiao, Wenbin Huang, Yanhua Liu, Xiangmin Li, Lin‐Sen Chen, Jian‐Xin Tang

Advanced Materials· Volume 28· Issue 47
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Source abstract

Abstract

Continuous and scalable nanopatterning over flexible substrates are highly desirable for both commercial and scientific interests, but difficult to be realized by traditional photolithographic processes. The current status of scalable nanopatterning technologies is reviewed by L.-S. Chen, J.-X. Tang, and co-workers on page 10353, with a focus on light management by photonic structures on flexible materials in optoelectronic devices. Critical challenges in various patterning techniques are discussed in terms of the resolution, scalability, processing throughput, and use of masks and resists.
Source: openalex_inverted_index · Quality: baseline

Research context

NanomaterialsElectronic materials

OpenAlex topics: Semiconductor Lasers and Optical Devices · Laser Material Processing Techniques · Optical Coatings and Gratings

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Collaborative Innovation Center of Suzhou Nano Science and Technology Soochow University Suzhou 215123 China

College of Physics, Optoelectronics and Energy Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province Key Lab of Modern Optical Technologies of Education Ministry of China Soochow University Suzhou 215006 China

Micro‐/Nano‐technology Research Center State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shanxi 710049 China

Institute of Functional Nano & Soft Materials (FUNSOM) Jiangsu Key Laboratory for Carbon‐Based Functional Materials & Devices Soochow University Suzhou 215123 China

References

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