Low temperature deposition of a CaF2 insulator layer on GaAs
Source abstract
Abstract
Multilayer semiconductor‐insulator structures composed of epitaxially grown layers of, for example, GaAs and CaF, have been the subject of widespread interest in recent years. The methods used to overcome lattice mismatch problems in order to obtain high quality insulator thin films are discussed along with photochemical decomposition methods for their production at low temperatures.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Optical Coatings and Gratings · Copper Interconnects and Reliability
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References (14)
Show source-provided references
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