Pliant Epitaxial Ionic Oxides on Silicon
Source abstract
Abstract
Pliant covalent-network SiO2 must be replaced by a high-dielectric constant (high-k) compound in silicon transistor gates. The known high-k dielectrics; however, are all rigid ionic crystals. We have discovered a new class of high-k oxides that emulates pliancy of the native SiO2 and self-constructs epitaxial films on silicon after annealing at ∼1030°C.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · Advanced Memory and Neural Computing
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (30)
Show source-provided references
1. 10.1038/nmat146610.1038/nmat1466 ↗
2. 10.1149/2.F05052IF10.1149/2.F05052IF ↗
3. 10.1021/ja01349a00610.1021/ja01349a006 ↗
4. 10.1007/1-4020-3078-9_510.1007/1-4020-3078-9_5 ↗
5. 10.1038/3502324310.1038/35023243 ↗
6. Wallace R. M. · Mat. Res. Bull. · 2002 · 27 · 192
7. 10.1088/0953-8984/16/44/01110.1088/0953-8984/16/44/011 ↗
8. 10.1007/1-4020-3078-9_410.1007/1-4020-3078-9_4 ↗
9. 10.1103/PhysRevLett.63.29810.1103/PhysRevLett.63.298 ↗
10. 10.1002/adfm.20039002010.1002/adfm.200390020 ↗
11. 10.1063/1.200539210.1063/1.2005392 ↗
12. 10.1038/nmat115710.1038/nmat1157 ↗
13. 10.1063/1.203261310.1063/1.2032613 ↗
14. 10.1016/S0925-8388(96)03121-010.1016/S0925-8388(96)03121-0 ↗
15. 10.1361/10549719877034190510.1361/105497198770341905 ↗
16. 10.1063/1.277153910.1063/1.2771539 ↗
17. 10.1016/j.tsf.2006.03.00610.1016/j.tsf.2006.03.006 ↗
18. 10.1007/BF0055225510.1007/BF00552255 ↗
19. 10.1107/S010876810201989410.1107/S0108768102019894 ↗
20. 10.1103/PhysRevB.18.440210.1103/PhysRevB.18.4402 ↗
21. 10.1557/mrs2002.7310.1557/mrs2002.73 ↗
22. 10.1038/nmat156910.1038/nmat1569 ↗
23. 10.1016/0022-3093(79)90033-410.1016/0022-3093(79)90033-4 ↗
24. 10.1063/1.12372810.1063/1.123728 ↗
25. 10.1016/S0955-2219(98)00032-610.1016/S0955-2219(98)00032-6 ↗
26. 10.1109/TED.2004.82951010.1109/TED.2004.829510 ↗
27. 10.1063/1.164405510.1063/1.1644055 ↗
28. 10.1002/pssb.20066680210.1002/pssb.200666802 ↗
29. 10.1063/1.182978110.1063/1.1829781 ↗
30. 10.1063/1.5680110.1063/1.56801 ↗