Enhanced Optical Transmission through MacEtch‐Fabricated Buried Metal Gratings
Source abstract
Abstract
Metallic films with subwavelength apertures, integrated into a semiconductor by metal-assisted chemical etch (MacEtch), demonstrate enhanced transmission when compared to bare semiconductor surfaces. The resulting "buried" metallic structures are characterized spectroscopically and modeled using rigorous coupled wave analysis. These composite materials offer potential integration with optoelectronic devices, for simultaneous near-uniform electrical contact and strong optical coupling to free space.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Photonic and Optical Devices · Optical Coatings and Gratings · Plasmonic and Surface Plasmon Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Electrical and Computer Engineering Micro and Nanotechnology Laboratory University of Illinois Urbana IL 61801 USA
Department of Physics and Applied Physics University of Massachusetts Lowell One University Ave Lowell MA 01854 USA
Microsystems Engineering Rochester Institute of Technology Rochester NY 14623 USA
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