journal article·2008-11-03

Non‐Relief‐Pattern Lithography Patterning of Solution Processed Organic Semiconductors

Sung Kyu Park, Devin A. Mourey, Sankar Subramanian, John E. Anthony, Thomas N. Jackson

Advanced Materials· Volume 20· Issue 21
Publisher page

Abstract

Patterning of solution processed organic semiconductors demonstrated using a non-relief-pattern, photoresist-free, lithographic process with a self-assembled monolayer (SAM) patterned by deep ultraviolet (DUV) irradiation. The patterned, low-surface-energy SAM then steers the organic semiconductor solution into areas where the SAM has been removed by the DUV exposure resulting in organic semiconductor microstructures with good resolution.
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Research context

OpenAlex topics: Organic Electronics and Photovoltaics · Organic Light-Emitting Diodes Research · Nanofabrication and Lithography Techniques

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