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journal article·2024-04Open access

Controlled Growth of Single‐Crystal Graphene Wafers on Twin‐Boundary‐Free Cu(111) Substrates

Yeshu Zhu, Jincan Zhang, Ting Cheng, Jilin Tang, Hongwei Duan, Zhaoning Hu, Jiaxin Shao, Shiwei Wang, Mingyue Wei, Haotian Wu, Ang Li, Sheng Li, Osman Balci, Sachin M. Shinde, Hamideh Ramezani, Luda Wang, Li Lin, Andrea C. Ferrari, Boris I. Yakobson, Hailin Peng, Kaicheng Jia, Zhongfan Liu

Advanced Materials· Volume 36· Issue 17
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Source abstract

Abstract

Abstract Single‐crystal graphene (SCG) wafers are needed to enable mass‐electronics and optoelectronics owing to their excellent properties and compatibility with silicon‐based technology. Controlled synthesis of high‐quality SCG wafers can be done exploiting single‐crystal Cu(111) substrates as epitaxial growth substrates recently. However, current Cu(111) films prepared by magnetron sputtering on single‐crystal sapphire wafers still suffer from in‐plane twin boundaries, which degrade the SCG chemical vapor deposition. Here, it is shown how to eliminate twin boundaries on Cu and achieve 4 in. Cu(111) wafers with ≈95% crystallinity. The introduction of a temperature gradient on Cu films with designed texture during annealing drives abnormal grain growth across the whole Cu wafer. In‐plane twin boundaries are eliminated via migration of out‐of‐plane grain boundaries. SCG wafers grown on the resulting single‐crystal Cu(111) substrates exhibit improved crystallinity with >97% aligned graphene domains. As‐synthesized SCG wafers exhibit an average carrier mobility up to 7284 cm2 V−1 s−1 at room temperature from 103 devices and a uniform sheet resistance with only 5% deviation in 4 in. region.
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Research context

NanomaterialsElectronic materialsMaterials processing

OpenAlex topics: Graphene research and applications · 2D Materials and Applications · Thermal properties of materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Center for Nanochemistry Beijing Science and Engineering Center for Nanocarbons Beijing National Laboratory for Molecular Science College of Chemistry and Molecular Engineering Peking University Beijing 100871 P. R. China

Academy for Advanced Interdisciplinary Studies Peking University Beijing 100871 P. R. China

Technology Innovation Center of Graphene Metrology and Standardization for State Market Regulation Beijing Graphene Institute Beijing 100095 P. R. China

Cambridge Graphene Centre University of Cambridge Cambridge CB3 0FA UK

Department of Materials Science & NanoEngineering Rice University Houston TX 77005 USA

National Key Laboratory of Advanced Micro and Nano Manufacture Technology School of Integrated Circuits Peking University Beijing 100871 P. R. China

School of Materials Science and Engineering Peking University Beijing 100871 P. R. China

College of Science China University of Petroleum Beijing 102249 P. R. China

Department of Chemistry Rice University Houston TX 77005 USA

Funding

National Natural Science Foundation of China · National Key Research and Development Program of China · Beijing National Laboratory for Molecular Sciences · Engineering and Physical Sciences Research Council · European Research Council · Basic Energy Sciences

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