DataVXAdvanced MaterialsPaper
journal article·2022-12

Transfer‐Free Quasi‐Suspended Graphene Grown on a Si Wafer

Haina Ci, Jingtao Chen, Hao Ma, Xiaoli Sun, Xingyu Jiang, Kaicong Liu, Jingyuan Shan, Xueyu Lian, Bei Jiang, Ruojuan Liu, Bingzhi Liu, Guiqi Yang, Wanjian Yin, Wen Zhao, Lizhen Huang, Teng Gao, Jingyu Sun, Zhongfan Liu

Advanced Materials· Volume 34· Issue 51
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Source abstract

Abstract

Abstract The direct growth of graphene affording wafer‐scale uniformity on insulators is paramount to electronic and optoelectronic applications; however, it remains a challenge to date, because it entails an entirely different growth mode than that over metals. Herein, the metal‐catalyst‐free growth of quasi‐suspended graphene on a Si wafer is demonstrated using an interface‐decoupling chemical vapor deposition strategy. The employment of lower‐than‐conventional H2 dosage and concurrent introduction of methanol during growth can effectively weaken the interaction between the synthesized graphene and the underlying substrate. The growth mode can be thus fine‐tuned, producing a predominantly monolayer graphene film with wafer‐level homogeneity. Graphene thus grown on a 4 inch Si wafer enables the transfer‐free fabrication of high‐performance graphene‐based field‐effect transistor arrays that exhibit almost no shift in the charge neutral point, indicating a quasi‐suspended feature of the graphene. Moreover, a carrier mobility up to 15 000 cm2 V‐1 s‐1 can be attained. This study is anticipated to offer meaningful insights into the synthesis of wafer‐scale high‐quality graphene on dielectrics for practical graphene devices.
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Research context

NanomaterialsElectronic materialsCatalysis & surfacesMaterials processing

OpenAlex topics: Graphene research and applications · 2D Materials and Applications · Graphene and Nanomaterials Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

College of Energy Soochow Institute for Energy and Materials Innovations Light Industry Institute of Electrochemical Power Sources Key Laboratory of Advanced Carbon Materials and Wearable Energy Technologies of Jiangsu Province Soochow University Suzhou 215006 P. R. China

Beijing Graphene Institute Beijing 100095 P. R. China

College of Electromechanical Engineering Qingdao University of Science and Technology Qingdao 266061 P. R. China

National Center for Nanoscience and Technology Chinese Academy of Sciences Beijing 100190 P. R. China

School of Materials Science and Engineering China University of Petroleum (East China) Qingdao 266580 P. R. China

Institute of Functional Nano & Soft Materials Collaborative Innovation Center of Suzhou Nano Science and Technology Soochow University Suzhou 215006 P. R. China

Center for Nanochemistry Beijing Science and Engineering Center for Nanocarbons College of Chemistry and Molecular Engineering Peking University Beijing 100871 P. R. China

Funding

National Natural Science Foundation of China

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