DataVXAdvanced MaterialsPaper
journal article·2024-07Open access

Eight In. Wafer‐Scale Epitaxial Monolayer MoS2

Hua Yu, Liangfeng Huang, Lanying Zhou, Yalin Peng, Xiuzhen Li, Peng Yin, Jiaojiao Zhao, Mingtong Zhu, Shuopei Wang, Jieying Liu, Hongyue Du, Jian Tang, Songge Zhang, Yuchao Zhou, Nianpeng Lu, Kaihui Liu, Na Li, Guangyu Zhang

Advanced Materials· Volume 36· Issue 30
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Source abstract

Abstract

Abstract Large‐scale, high‐quality, and uniform monolayer molybdenum disulfide (MoS2) films are crucial for their applications in next‐generation electronics and optoelectronics. Epitaxy is a mainstream technique for achieving high‐quality MoS2 films and is demonstrated at a wafer scale up to 4‐in. In this study, the epitaxial growth of 8‐in. wafer‐scale highly oriented monolayer MoS2 on sapphire is reported as with excellent spatial homogeneity, using a specially designed vertical chemical vapor deposition (VCVD) system. Field effect transistors (FETs) based on the as‐grown 8‐in. wafer‐scale monolayer MoS2 film are fabricated and exhibit high performances, with an average mobility and an on/off ratio of 53.5 cm2 V−1 s−1 and 107, respectively. In addition, batch fabrication of logic devices and 11‐stage ring oscillators are also demonstrated, showcasing excellent electrical functions. This work may pave the way of MoS2 in practical industry‐scale applications.
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Research context

Electronic materialsMaterials processing

OpenAlex topics: 2D Materials and Applications · MXene and MAX Phase Materials · Advanced biosensing and bioanalysis techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Songshan Lake Materials Laboratory Dongguan 523808 China

MOE Key Laboratory of Laser Life Science & Guangdong Provincial Key Laboratory of Laser Life Science College of Biophotonics South China Normal University Guangzhou 510631 China

Beijing National Laboratory for Condensed Matter Physics and Institute of Physics Chinese Academy of Sciences Beijing 100190 China

State Key Laboratory for Mesoscopic Physics Frontiers Science Center for Nano‐optoelectronics School of Physics Peking University Beijing 100190 China

Key Laboratory of Quantum State Construction and Manipulation (Ministry of Education) Department of Physics Renmin University of China Beijing 100190 China

Funding

National Basic Research Program of China · National Natural Science Foundation of China

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