journal article·2016-12

Toward Scalable Flexible Nanomanufacturing for Photonic Structures and Devices

Wen Qiao, Wenbin Huang, Yanhua Liu, Xiangmin Li, Lin‐Sen Chen, Jian‐Xin Tang

Advanced Materials· Volume 28· Issue 47
Publisher page

Abstract

Continuous and scalable nanopatterning over flexible substrates is highly desirable for both commercial and scientific interests, but is difficult to realize with traditional photolithographic processes. The recent advancements in nanofabrication methodologies enable light management with photonic structures on flexible materials, providing an increasingly popular strategy to control the light harvesting in the optoelectronic devices of photovoltaics, and in organic and inorganic light‐emitting diodes. Here, the current status of nanopatterning technologies for the fabrication of optoelectronic devices is summarized. Scalable nanopatterning technologies for nanomanufacturing on flexible materials are emphasized. Critical challenges in various patterning techniques when considering the resolution, scalability, processing throughput, and the use of masks and resists are addressed. The integration of flexible nanopatterned substrates with light manipulation in organic optoelectronic devices is also discussed; this enables the control of light flux and spectra. Finally, potential development directions are highlighted.
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Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Nanowire Synthesis and Applications · Photonic and Optical Devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Collaborative Innovation Center of Suzhou Nano Science and Technology Soochow University Suzhou 215123 China

College of Physics, Optoelectronics and Energy Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province Key Lab of Modern Optical Technologies of Education Ministry of China Soochow University Suzhou 215006 China

Micro‐/Nano‐technology Research Center State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shanxi 710049 China

Institute of Functional Nano & Soft Materials (FUNSOM) Jiangsu Key Laboratory for Carbon‐Based Functional Materials & Devices Soochow University Suzhou 215123 China

Funding

National Natural Science Foundation of China · China Postdoctoral Science Foundation

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