Dielectric Engineering of a Boron Nitride/Hafnium Oxide Heterostructure for High‐Performance 2D Field Effect Transistors

Xuming Zou; Chun‐Wei Huang; Lifeng Wang; Long‐Jing Yin; Wenqing Li; Jingli Wang; Bin Wu; Yunqi Liu; Qian Yao; Changzhong Jiang; Wen‐Wei Wu; Lin He; Shanshan Chen; Johnny C. Ho; Lei Liao

doi:10.1002/adma.201505205

journal article·2016-03Open access

Dielectric Engineering of a Boron Nitride/Hafnium Oxide Heterostructure for High‐Performance 2D Field Effect Transistors

Xuming Zou, Chun‐Wei Huang, Lifeng Wang, Long‐Jing Yin, Wenqing Li, Jingli Wang, Bin Wu, Yunqi Liu, Qian Yao, Changzhong Jiang, Wen‐Wei Wu, Lin He, Shanshan Chen, Johnny C. Ho, Lei Liao

Advanced Materials· Volume 28· Issue 10

Publisher page Open full text

Source abstract

Abstract

A unique design of a hexagonal boron nitride (h-BN)/HfO2 dielectric heterostructure stack is demonstrated, with few-layer h-BN to alleviate the surface optical phonon scattering, followed by high-κ HfO2 deposition to suppress Coulombic impurity scattering so that high-performance top-gated two-dimensional semiconductor transistors are achieved. Furthermore, this dielectric stack can also be extended to GaN-based transistors to enhance their performance. As a service to our authors and readers, this journal provides supporting information supplied by the authors. Such materials are peer reviewed and may be re-organized for online delivery, but are not copy-edited or typeset. Technical support issues arising from supporting information (other than missing files) should be addressed to the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.

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Research context

Electronic materials Materials processing

OpenAlex topics: Semiconductor materials and devices · Advancements in Semiconductor Devices and Circuit Design · Graphene research and applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Physics and Key Laboratory of Artificial Micro‐ and Nano‐structures of Ministry of Education Wuhan University Wuhan 430072 China

Department of Materials Science and Engineering National Chiao Tung University Hsin‐chu 30010 Taiwan

Beijing National Laboratory for Molecular Sciences Key Laboratory of Organic Solids Institute of Chemistry Chinese Academy of Science Beijing 100190 China

Center for Advanced Quantum Studies Department of Physics Beijing Normal University Beijing 100875 China

Physics Department Xiamen University Xiamen 361005 China

Department of Physics and Materials Science City University of Hong Kong Tat Chee Avenue Kowloon Hong Kong SAR China

Funding

MOST · MOE · NSFC · Fundamental Research Funds for the Central Universities · National Natural Science Foundation of China · Chinese Academy of Sciences and the Strategic Priority Research Program of the Chinese Academy of Sciences · Ministry of Science and Technology

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