Large‐Scale Precise Printing of Ultrathin Sol–Gel Oxide Dielectrics for Directly Patterned Solution‐Processed Metal Oxide Transistor Arrays
Source abstract
Abstract
Ultrathin and dense metal oxide gate di-electric layers are reported by a simple printing of AlOx and HfOx sol-gel precursors. Large-area printed indium gallium zinc oxide (IGZO) thin-film transistor arrays, which exhibit mobilities >5 cm(2) V(-1) s(-1) and gate leakage current of 10(-9) A cm(-2) at a very low operation voltage of 2 V, are demonstrated by continuous simple bar-coated processes.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · ZnO doping and properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Materials Science and Engineering and Research Institute for Solar and Sustainable Energies Gwangju Institute of Science and Technology (GIST) 261 Cheomdan‐gwagiro Buk‐gu Gwangju 500‐512 Republic of Korea
Department of Energy and Materials Engineering Dongguk University 26 Pil‐dong, 3‐ga Jung‐gu Seoul 100‐715 Republic of Korea
Funding
Ministry of Science, ICT and Future Planning
References (35)
Show source-provided references
1. 10.1002/adma.20120536110.1002/adma.201205361 ↗
2. 10.1021/cr050154310.1021/cr0501543 ↗
3. 10.1038/nature0249810.1038/nature02498 ↗
4. 10.1038/nature0772710.1038/nature07727 ↗
5. 10.1021/cr900150b10.1021/cr900150b ↗
6. 10.1038/asiamat.2010.510.1038/asiamat.2010.5 ↗
7. 10.1002/adma.20110322810.1002/adma.201103228 ↗
8. 10.1002/978352767997310.1002/9783527679973 ↗
9. 10.1073/pnas.150154811210.1073/pnas.1501548112 ↗
10. 10.1109/TED.2009.203954110.1109/TED.2009.2039541 ↗
11. 10.1038/nature0309010.1038/nature03090 ↗
12. 10.1038/nmat256010.1038/nmat2560 ↗
13. 10.1038/nmat291410.1038/nmat2914 ↗
14. 10.1038/nmat301110.1038/nmat3011 ↗
15. 10.1038/nature1143410.1038/nature11434 ↗
16. 10.1002/adfm.20150054510.1002/adfm.201500545 ↗
17. 10.1063/1.356889310.1063/1.3568893 ↗
18. 10.1002/adma.20100393510.1002/adma.201003935 ↗
19. 10.1088/0268-1242/20/4/00410.1088/0268-1242/20/4/004 ↗
20. 10.1021/la403328210.1021/la4033282 ↗
21. 10.1002/adma.20130318610.1002/adma.201303186 ↗
22. 10.1021/cr900127510.1021/cr9001275 ↗
23. 10.1002/047006832910.1002/0470068329 ↗
24. 10.1002/adma.20130162210.1002/adma.201301622 ↗
25. 10.1002/adma.20100364110.1002/adma.201003641 ↗
26. 10.1201/b1030410.1201/b10304 ↗
27. Tracton A. A. · 2010
28. 10.1002/1521-4095(20020618)14:12<915::AID-ADMA915>3.0.CO;2-910.1002/1521-4095(20020618)14:12<915::AID-ADMA915>3.0.CO;2-9 ↗
29. 10.1002/adma.20120533010.1002/adma.201205330 ↗
30. 10.1002/adma.20140152010.1002/adma.201401520 ↗
31. 10.1039/c2jm15299a10.1039/c2jm15299a ↗
32. 10.1039/c3tc31933d10.1039/c3tc31933d ↗
33. 10.1021/la700493p10.1021/la700493p ↗
34. 10.1063/1.309566510.1063/1.3095665 ↗
35. 10.1039/C5RA04515K10.1039/C5RA04515K ↗