TFT Channel Materials for Display Applications: From Amorphous Silicon to Transition Metal Dichalcogenides
Source abstract
Abstract
Abstract As the need for super‐high‐resolution displays with various form factors has increased, it has become necessary to produce high‐performance thin‐film transistors (TFTs) that enable faster switching and higher current driving of each pixel in the display. Over the past few decades, hydrogenated amorphous silicon (a‐Si:H) has been widely utilized as a TFT channel material. More recently, to meet the requirement of new types of displays such as organic light‐emitting diode displays, and also to overcome the performance and reliability issues of a‐Si:H, low‐temperature polycrystalline silicon and amorphous oxide semiconductors have partly replaced a‐Si:H channel materials. Basic material properties and device structures of TFTs in commercial displays are explored, and then the potential of atomically thin layered transition metal dichalcogenides as next‐generation channel materials is discussed.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Transition Metal Oxide Nanomaterials · ZnO doping and properties
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Graphene/2D Materials Research Center Center for Advanced Materials Discovery towards 3D Display School of Electrical Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon 34141 Korea
Department of Mechanical Engineering University of California Berkeley CA 94720 USA
Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology (KAIST) Daejeon 34141 Korea
Funding
National Research Foundation of Korea
References (100+)
Show source-provided references
1. 10.1002/j.1538-7305.1927.tb00209.x10.1002/j.1538-7305.1927.tb00209.x ↗
2. 10.1109/TPS.2006.87244010.1109/TPS.2006.872440 ↗
3. 10.1109/JDT.2007.90155510.1109/JDT.2007.901555 ↗
4. b)M.Zhanjie US Patent 9 478 164 2016.10.1016/S0031-9384(16)30653-9 ↗
5. 10.1002/j.2168-0159.2013.tb06131.x10.1002/j.2168-0159.2013.tb06131.x ↗
6. 10.1109/TED.2003.81138710.1109/TED.2003.811387 ↗
7. 10.1889/1.198490210.1889/1.1984902 ↗
8. 10.1109/TED.2017.271873010.1109/TED.2017.2718730 ↗
9. Li Z. R. · 2017
10. 10.1016/S0026-2714(02)00027-610.1016/S0026-2714(02)00027-6 ↗
11. 10.1002/adma.20110322810.1002/adma.201103228 ↗
12. 10.1109/JRPROC.1962.28819010.1109/JRPROC.1962.288190 ↗
13. 10.1016/0040-6090(78)90088-310.1016/0040-6090(78)90088-3 ↗
14. 10.1109/PROC.1971.848910.1109/PROC.1971.8489 ↗
15. 10.1109/T-ED.1973.1778010.1109/T-ED.1973.17780 ↗
16. 10.1049/el:1979012610.1049/el:19790126 ↗
17. 10.1149/2.F06131if10.1149/2.F06131if ↗
18. 10.1016/0022-0248(76)90072-510.1016/0022-0248(76)90072-5 ↗
19. 10.1149/1.241177910.1149/1.2411779 ↗
20. 10.1103/PhysRevB.48.1081510.1103/PhysRevB.48.10815 ↗
21. 10.1063/1.9875110.1063/1.98751 ↗
22. 10.1016/0022-3093(79)90087-510.1016/0022-3093(79)90087-5 ↗
23. 10.1080/1364281780824533910.1080/13642817808245339 ↗
24. 10.1038/srep1346710.1038/srep13467 ↗
25. 10.1063/1.9340010.1063/1.93400 ↗
26. 10.1147/rd.431.007310.1147/rd.431.0073 ↗
27. 10.1016/0022-3093(89)90350-510.1016/0022-3093(89)90350-5 ↗
28. b)W.Park S.Lee US Patent 5 478 766 1995.
29. 10.1088/0034-4885/53/3/00110.1088/0034-4885/53/3/001 ↗
30. 10.1063/1.165522010.1063/1.1655220 ↗
31. 10.1063/1.9071110.1063/1.90711 ↗
32. 10.1063/1.9869210.1063/1.98692 ↗
33. 10.1063/1.9439910.1063/1.94399 ↗
34. 10.1063/1.10070410.1063/1.100704 ↗
35. 10.1007/s00339-008-5019-810.1007/s00339-008-5019-8 ↗
36. 10.1063/1.297786510.1063/1.2977865 ↗
37. 10.1103/PhysRevB.5.314410.1103/PhysRevB.5.3144 ↗
38. 10.1016/0022-3093(85)90915-910.1016/0022-3093(85)90915-9 ↗
39. 10.1103/PhysRevB.32.2310.1103/PhysRevB.32.23 ↗
40. 10.1063/1.33133910.1063/1.331339 ↗
41. 10.1103/PhysRevLett.52.236010.1103/PhysRevLett.52.2360 ↗
42. Mara W. C. · 2012
43. 10.1016/S0169-4332(02)01343-010.1016/S0169-4332(02)01343-0 ↗
44. 10.1063/1.11061710.1063/1.110617 ↗
45. 10.1889/1.183398710.1889/1.1833987 ↗
46. 10.1016/j.sse.2004.04.00810.1016/j.sse.2004.04.008 ↗
47. 10.1109/4.56367910.1109/4.563679 ↗
48. 10.1109/55.2040110.1109/55.20401 ↗
49. 10.1109/JSSC.1980.105141610.1109/JSSC.1980.1051416 ↗
50. b)J.Lee US Patent 5 430 320 1995.
51. Hatano M. · IEDM 98 Digest · 1997 · 523
52. 10.1557/PROC-106-31710.1557/PROC-106-317 ↗
53. 10.1109/16.3427010.1109/16.34270 ↗
54. 10.1109/LED.2003.82167010.1109/LED.2003.821670 ↗
55. J.Ha US Patent 10 211 270 2019.10.5694/mja2.50341 ↗
56. 10.1143/JJAP.45.437810.1143/JJAP.45.4378 ↗
57. 10.1016/0022-3093(96)80019-610.1016/0022-3093(96)80019-6 ↗
58. 10.1016/0022-3093(96)00367-510.1016/0022-3093(96)00367-5 ↗
59. Oxtoby D. W. · 2011
60. 10.1038/nature0309010.1038/nature03090 ↗
61. a)Y.Kanzaki T.Kusumi N.Tamari M.Moriguchi US Patent 0 110 249 2014;
62. 10.1002/sdtp.1184310.1002/sdtp.11843 ↗
63. 10.1038/s41928-018-0106-010.1038/s41928-018-0106-0 ↗
64. Lee H. · Proc. IDW · 2006 · 663
65. 10.1063/1.178889710.1063/1.1788897 ↗
66. 10.1002/adfm.20039002010.1002/adfm.200390020 ↗
67. 10.1103/PhysRevB.84.11520510.1103/PhysRevB.84.115205 ↗
68. 10.1016/j.jnoncrysol.2006.01.07310.1016/j.jnoncrysol.2006.01.073 ↗
69. 10.1063/1.292730610.1063/1.2927306 ↗
70. 10.1063/1.290470410.1063/1.2904704 ↗
71. 10.1063/1.285746310.1063/1.2857463 ↗
72. 10.1002/pssa.20088130310.1002/pssa.200881303 ↗
73. 10.1109/JDT.2009.203455910.1109/JDT.2009.2034559 ↗
74. 10.1063/1.275310710.1063/1.2753107 ↗
75. 10.1063/1.296614510.1063/1.2966145 ↗
76. 10.1016/j.tsf.2007.10.05110.1016/j.tsf.2007.10.051 ↗
77. 10.1109/LED.2014.233623210.1109/LED.2014.2336232 ↗
78. V.Gupta C.‐W.Lin Y.Bi H. S.Lin J.‐P. S.Guillou T.‐T.Tsai S. Y.Youn US Patent 0 092 196 2017.
79. 10.1002/sdtp.1297810.1002/sdtp.12978 ↗
80. 10.1149/05401.0103ecst10.1149/05401.0103ecst ↗
81. 10.1063/1.282475810.1063/1.2824758 ↗
82. 10.1063/1.356488210.1063/1.3564882 ↗
83. 10.1088/2053-1583/aaf83610.1088/2053-1583/aaf836 ↗
84. 10.1021/acsaelm.9b0007810.1021/acsaelm.9b00078 ↗
85. 10.1063/1.313106210.1063/1.3131062 ↗
86. 10.1021/nl401938t10.1021/nl401938t ↗
87. 10.1002/adma.20110479810.1002/adma.201104798 ↗
88. 10.1088/2053-1583/aa6fd210.1088/2053-1583/aa6fd2 ↗
89. 10.1038/ncomms956910.1038/ncomms9569 ↗
90. 10.1038/s41586-018-0008-310.1038/s41586-018-0008-3 ↗
91. 10.1021/acs.nanolett.6b0032410.1021/acs.nanolett.6b00324 ↗
92. 10.1002/adma.20180630610.1002/adma.201806306 ↗
93. 10.1002/adma.20150167810.1002/adma.201501678 ↗
94. 10.1088/2053-1583/aa967410.1088/2053-1583/aa9674 ↗
95. 10.1016/j.nanoen.2019.04.06110.1016/j.nanoen.2019.04.061 ↗
96. 10.1002/adma.20110441710.1002/adma.201104417 ↗
97. 10.1002/adma.20170059510.1002/adma.201700595 ↗
98. 10.1002/adma.20160658610.1002/adma.201606586 ↗
99. 10.1002/ppsc.20160042910.1002/ppsc.201600429 ↗
100. 10.1002/adfm.20170113810.1002/adfm.201701138 ↗