journal article·2017-05

Nanocomposites of polyimide and mixed oxide nanoparticles for high performance nanohybrid gate dielectrics in flexible thin film transistors

Ju Hyun Kim, Byeong-Ung Hwang, Do-Il Kim, Jin Soo Kim, Young Gug Seol, Tae Woong Kim, Nae-Eung Lee

Electronic Materials Letters· Volume 13· Issue 3
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Abstract

Organic gate dielectrics in thin film transistors (TFTs) for flexible display have advantages of high flexibility yet have the disadvantage of low dielectric constant (low-k). To supplement low-k characteristics of organic gate dielectrics, an organic/inorganic nanocomposite insulator loaded with high-k inorganic oxide nanoparticles (NPs) has been investigated but high loading of high-k NPs in polymer matrix is essential. Herein, compositing of over-coated polyimide (PI) on self-assembled (SA) layer of mixed HfO2 and ZrO2 NPs as inorganic fillers was used to make dielectric constant higher and leakage characteristics lower. A flexible TFT with lower the threshold voltage and high current on/off ratio could be fabricated by using the hybrid gate dielectric structure of the nanocomposite with SA layer of mixed NPs on ultrathin atomic-layer deposited Al2O3.
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Research context

OpenAlex topics: Semiconductor materials and devices · Thin-Film Transistor Technologies · Organic Electronics and Photovoltaics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (30)

Show source-provided references
1. V. Subramanian, P. C. Chang, J. B. Lee, S. E. Molesa, and S. K. Volkman, IEEE Trans. Compon. Pack. Technol. 28, 742 (2005).10.1109/TCAPT.2005.859672 ↗
2. G. H. Gelinck, H. E. A. Huitema, E. V. Veenendaal, E. Cantatore, L. Schrijnemakers, J. B. P. H. V. D. Putten, T. C. T. Geuns, M. Beenhakkers, J. B. Giesbers, B. H. Huisman, E. J. Meijer, E. M. Benito, F. J. Touwslager, A. W. Marsman, B. J. E. V. Rens, and D. M. D. Leeuw, Nature 3, 106 (2004).10.1038/nmat1061 ↗
3. J. S. Park, T. W. Kim, D. Stryakhilev, J. S. Lee, S. G. An, Y. S. Pyo, D. B. Lee, Y. G. Mo, D. U. Jin, and H. K. Chung, Appl. Phys. Lett. 95, 013503 (2009).10.1063/1.3159832 ↗
4. L. Zhou, S. K. Park, B. Bai, J. Sun, S. C. Wu, T. N. Jackson, S. Nelson, D. Freeman, and Y. T. Hong, IEEE Electr. Device L. 26, 640 (2005).10.1109/LED.2005.853654 ↗
5. C. B. Park, J. E. Lee, H. Na, K. M. Kim, S. S. Yoo, and M. S. Yang, Solid-State Electron. 111, 227 (2015).10.1016/j.sse.2015.03.018 ↗
6. M. Mizukami, S. Oku, S.-I. Cho, M. Tatetsu, M. Abiko, M Mamada, T. Sakanoue, Y. Suzuri, J. Kido, and S. Tokito, IEEE Electr. Device L. 36, 841 (2015).10.1109/LED.2015.2443184 ↗
7. W. Fix, A. Ullmann, J. Ficker, and W. Clemens, Appl. Phys. Lett. 81, 1735 (2002).10.1063/1.1501450 ↗
8. N. T. Tien, S. Jeon, D.-I. Kim, T. Q. Trung, M. Jang, B.-U. Hwang, K.-E. Byun, J. Bae, E. Lee, J. B.-H. Tok, Z. Bao, N.-E. Lee, and J. J. Park, Adv. Mater. 26, 796 (2014).10.1002/adma.201302869 ↗
9. N. T. Tien, T. Q. Trung, Y. G. Seoul, D.-I. Kim, and N.-E. Lee, ACS Nano 5, 7069 (2011).10.1021/nn2017827 ↗
10. M. S. Oh, W. Choi, K. Lee, D. K. Hwang, and S. Im, Appl. Phys. Lett. 93, 033510 (2008).10.1063/1.2956406 ↗
11. D.-I. Kim, B.-U. Hwang, J. S. Park, H. S. Jeon, B. S. Bae, H. J. Lee, and N.-E. Lee, Org. Elecron. 13, 2401 (2012).10.1016/j.orgel.2012.06.038 ↗
12. Y. G. Seol, J. S. Park, N. T. Tien, N.-E. Lee, D. K. Lee, S. C. Lee, Y. J. Kim, C.-S. Lee, and H. Kim, J. Electrochem. Soc. 157, H1046 (2010).10.1149/1.3489944 ↗
13. Y. G. Seol, N.-E. Lee, S. H. Park, and J. Y. Bae, Org. Electron. 9, 413 (2008).10.1016/j.orgel.2008.02.003 ↗
14. H. Y. Noh, Y. G. Seol, and N.-E. Lee, Appl. Phys. Lett. 95, 113302 (2009).10.1063/1.3224909 ↗
15. A. F. Stassen, R. W. I. D. Boer, N. N. Losad, and A. F. Morpurgo, Appl. Phys. Lett. 85, 3899 (2004).10.1063/1.1812368 ↗
16. S. Y. Yang, K. Shin, and C. E. Park, Adv. Funct. Mater. 15, 1806 (2005).10.1002/adfm.200400486 ↗
17. W. H. Lee, C. C. Wang, and J. C. Ho, J. Vac. Sci. Technol. B. 27, 601 (2009).10.1116/1.3093881 ↗
18. D. Braga and G. Horowitz, Adv. Mater. 21, 1473 (2009).10.1002/adma.200802733 ↗
19. B.-U. Hwang, D.-I. Kim, S.-W. Cho, M.-G. Yun, H. J. Kim, Y. J. Kim, H.-K. Cho, and N.-E. Lee, Org. Electron. 15, 1458 (2014).10.1016/j.orgel.2014.04.003 ↗
20. C. S. Kim, S. J. Jo, S. W. Lee, W. J. Kim, H. K. Baik, S. J. Lee, D. K. Hwang, and S. Im, Appl. Phys. Lett. 88, 243515 (2006).10.1063/1.2213196 ↗
21. W. H. Lee and C. C. Wang, J. Vac. Sci. Technol. B. 27, 1116 (2009).10.1116/1.3117360 ↗
22. P. Kim, X.-H. Zhang, B. Domercq, S. C. Jones, P. J. Hotchkiss, S. R. Marder, B. Kippelen, and J. W. Perry, Appl. Phys. Lett. 93, 013302 (2008).10.1063/1.2949320 ↗
23. S. Kango, S. Kalia, A. Celli, J. Njuguna, Y. Habibi, and R. Kumar, Prog. Polym. Sci. 38, 1232 (2013).10.1016/j.progpolymsci.2013.02.003 ↗
24. A. Ulman, Chem. Rev. 96, 1533 (1996).10.1021/cr9502357 ↗
25. J. S. Kim, D.-I. Kim, B.-U. Hwang, Y. G. Seol, T. U. Kim, and N.-E. Lee, Sci. Adv. Mater. 7, 1469 (2015).10.1166/sam.2015.2357 ↗
26. M. S. Go, J.-M. Song, C. Kim, J. Lee, J. Kim, and M. J. Lee, Electron. Mater. Lett. 11, 252 (2015).10.1007/s13391-014-4290-4 ↗
27. J. S. Kim, J. H. Kim, Y. G. Seol, T. U. Kim, and N.-E. Lee, J. Nanosci. Nanotechnol. 16, 11335 (2016).10.1166/jnn.2016.13504 ↗
28. Y. G. Ha, S. Jeong, J. Wu, M. Kim, V. P. Dravid, A. Facchetti, and T. J. Marks, J. Am. Chem. Soc. 132, 17426 (2010).10.1021/ja107079d ↗
29. Y. G. Seol, H. Y. Noh, S. Lee, J. H. Ahn, and N.-E. Lee, Appl. Phys. Lett. 93, 013305 (2008).10.1063/1.2956407 ↗
30. M. S. Go, J.-M. Song, C. Kim, J. Lee, J. Kim, and M. J. Lee, Electron. Mater. Lett. 11, 252 (2015).10.1007/s13391-014-4290-4 ↗