Nanostructures and Functional Materials Fabricated by Interferometric Lithography

Abstract Interferometric lithography (IL) is a powerful technique for the definition of large‐area, nanometer‐scale, periodically patterned structures. Patterns are recorded in a light‐sensitive medium, such as a photoresist, that responds nonlinearly to the intensity distribution associated with the interference of two or more coherent beams of light. The photoresist patterns produced with IL are a platform for further fabrication of nanostructures and growth of functional materials and are building blocks for devices. This article provides a brief review of IL technologies and focuses on various applications for nanostructures and functional materials based on IL including directed self‐assembly of colloidal nanoparticles, nanophotonics, semiconductor materials growth, and nanofluidic devices. Perspectives on future directions for IL and emerging applications in other fields are presented.