The International Technology Roadmap for Semiconductors—Perspectives and challenges for the next 15 years

Abstract The paper will give an overview on the structure and the contents of the International Technology Roadmap for Semiconductors (ITRS), with special emphasis on the ‘ITRS 2001’ edition. The scope of the ITRS covers the next 15 years. The outlook in semiconductor manufacturing expects the continuous application of silicon technology where CMOS based devices will carry the development of the industry at least for one more decade. New device architectures and concepts based on silicon wafer material are being developed to support the development of the IC industry for another one or two decades. The paper will highlight the key issues of future requirements on semiconductor structures and processes for manufacturing technologies on silicon. These will cover material aspects for front end processing, interconnect, lithography, and new devices.