The Emerging Nano‐Opto‐Electromechanical Systems Based on van der Waals Heterostructures

Abstract Nano‐opto‐electromechanical systems (NOEMS) is a new class of hybrid nanoscale or even atomic‐level systems that couple and manipulate optical, electrical, mechanical degrees of freedom in both classical and quantum domains. Recently, van der Waals heterostructures (vdWHs) have been investigated as a promising platform for the construction of NOEMS owing to their unique ability to combine a variety of 2D materials characterizing atomic‐scale, low effective mass, and exceptional optoelectric and mechanical properties. The unparalleled versatility in the selection of 2D materials and the stacking‐sequences of vdWHs open new avenues for the creation of multifunctional devices with tunable properties, paving the way for advanced technologies in nanoresonators, sensors, nano‐optoelectronics, and beyond. In this review, the characteristics of vdWHs applied to NOEMS, fabrication techniques, excitation and detection methods, and representative applications of the vdWHs‐based NOEMS are summarized, then concluded with a discussion of future opportunities and challenges for vdWHs‐based NOEMS, aiming to accelerate the development and application of high‐quality NOEMS.