journal article·2025-08

Recent Progress on Flexible Silicon Nanomembranes for Advanced Electronics and Optoelectronics

Ziyu Zhang, Yang Wang, Tianjun Cai, Binmin Wu, Bofan Hu, Xing Li, Enming Song, Gaoshan Huang, Ziao Tian, Zengfeng Di, Yongfeng Mei

Advanced Functional Materials· Volume 35· Issue 35
Publisher page

Abstract

Abstract Silicon nanomembranes, an emerging material with ultrathin thickness, combine the electrical properties of semiconductors with the flexibility that bulk materials lack. These nanomembranes can impart enhanced functionality to devices, supporting development needs for next‐generation technologies “more‐than‐Moore” Law. In recent years, as research of fabrication techniques and fundamental principles have advanced, the focus of silicon nanomembrane studies has evolved from material preparation and component processing to functionalization and system‐level integration. This review begins with an overview of silicon nanomembrane preparation methods and formation principles. In terms of device advancements and applications, developments in optoelectronic devices, sensors, biomedicine, energy harvesting, and integrated circuits are covered. Finally, the review discusses the current challenges in silicon nanomembrane technology and the potential of silicon nanomembrane devices and systems in future optoelectronics, biomedicine, energy harvesting, and advanced integrated circuit architectures.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Advanced Materials and Mechanics · Nanowire Synthesis and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Materials Science & State Key Laboratory of Surface Physics Fudan University Shanghai 200438 P. R. China

State Key Laboratory of Infrared Physics Shanghai Institute of Technical Physics Chinese Academy of Sciences Shanghai 200083 P. R. China

International Institute of Intelligent Nanorobots and Nanosystems Fudan University Shanghai 200438 P. R. China

Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception Institute of Optoelectronics Fudan University Shanghai 200438 P. R. China

Yiwu Research Institute of Fudan University Yiwu Zhejiang 322000 P. R. China

State Key Laboratory of Photovoltaic Science and Technology Fudan University Shanghai 200438 P. R. China

State Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 P. R. China

Funding

National Natural Science Foundation of China · Science and Technology Commission of Shanghai Municipality · China Postdoctoral Science Foundation · National Postdoctoral Program for Innovative Talents · Key Technologies Research and Development Program

References (100+)

Show source-provided references
1. 10.1038/s41578-022-00423-210.1038/s41578-022-00423-2 ↗
2. 10.1038/s41467-024-44750-010.1038/s41467-024-44750-0 ↗
3. 10.1038/s41377-021-00551-410.1038/s41377-021-00551-4 ↗
4. 10.1002/adma.20200457710.1002/adma.202004577 ↗
5. 10.1038/s41928-021-00681-y10.1038/s41928-021-00681-y ↗
6. 10.1126/science.110073110.1126/science.1100731 ↗
7. 10.1007/978-81-322-3625-210.1007/978-81-322-3625-2 ↗
8. 10.1109/16.55771910.1109/16.557719 ↗
9. 10.1039/B916582G10.1039/B916582G ↗
10. 10.1126/science.115436710.1126/science.1154367 ↗
11. 10.1063/1.171386310.1063/1.1713863 ↗
12. a)M. W. M.Graef inIEEE Int. Roadmap for Devices Systems Outbriefs IEEE Piscataway NJ2021;
13. b)H.Wong 2021 IEEE 32nd International Conference on Microelectronics (MIEL) IEEE Piscataway NJ2021.
14. 10.1021/acsenergylett.4c0026210.1021/acsenergylett.4c00262 ↗
15. Zhang T. · Adv. Electron. Mater. · 2024
16. 10.1038/s41467-025-56376-x10.1038/s41467-025-56376-x ↗
17. 10.1002/adma.20150511310.1002/adma.201505113 ↗
18. b)R. S.Pal S.Sharma S.Dasgupta 2017 Conference on Emerging Devices and Smart Systems (ICEDSS)2017;
19. 10.1109/JEDS.2017.268973810.1109/JEDS.2017.2689738 ↗
20. 10.1038/s41586-021-03259-y10.1038/s41586-021-03259-y ↗
21. 10.1109/JPROC.2018.286466810.1109/JPROC.2018.2864668 ↗
22. 10.1002/lpor.20170023710.1002/lpor.201700237 ↗
23. 10.1038/s41551-020-00604-w10.1038/s41551-020-00604-w ↗
24. 10.1038/s41566-021-00776-010.1038/s41566-021-00776-0 ↗
25. 10.1109/JMEMS.2021.306018210.1109/JMEMS.2021.3060182 ↗
26. 10.1002/pssr.20230034910.1002/pssr.202300349 ↗
27. 10.1021/nn103149c10.1021/nn103149c ↗
28. 10.1103/PhysRevApplied.9.02403710.1103/PhysRevApplied.9.024037 ↗
29. 10.1073/pnas.130810911010.1073/pnas.1308109110 ↗
30. 10.1002/adma.20230671510.1002/adma.202306715 ↗
31. 10.1002/adom.20190082310.1002/adom.201900823 ↗
32. 10.1073/pnas.151560211210.1073/pnas.1515602112 ↗
33. 10.1088/0957-4484/25/46/46550110.1088/0957-4484/25/46/465501 ↗
34. 10.1038/s41586-023-05921-z10.1038/s41586-023-05921-z ↗
35. 10.1021/nl403251e10.1021/nl403251e ↗
36. 10.1002/adma.20100058310.1002/adma.201000583 ↗
37. 10.1021/acsami.8b1395110.1021/acsami.8b13951 ↗
38. 10.1039/C9NR03995C10.1039/C9NR03995C ↗
39. 10.1038/nature1038110.1038/nature10381 ↗
40. 10.1126/sciadv.adp880410.1126/sciadv.adp8804 ↗
41. 10.1002/adma.20210586510.1002/adma.202105865 ↗
42. 10.1021/acs.nanolett.1c0297210.1021/acs.nanolett.1c02972 ↗
43. 10.1002/adma.20241377110.1002/adma.202413771 ↗
44. 10.1126/sciadv.aaw189910.1126/sciadv.aaw1899 ↗
45. 10.1038/s41928-021-00600-110.1038/s41928-021-00600-1 ↗
46. 10.1073/pnas.240395012110.1073/pnas.2403950121 ↗
47. 10.1063/1.239703810.1063/1.2397038 ↗
48. 10.1073/pnas.100582810710.1073/pnas.1005828107 ↗
49. 10.1073/pnas.190769711610.1073/pnas.1907697116 ↗
50. 10.1126/sciadv.aaz651110.1126/sciadv.aaz6511 ↗
51. 10.1109/TED.2016.261842310.1109/TED.2016.2618423 ↗
52. 10.1016/j.eml.2014.12.00310.1016/j.eml.2014.12.003 ↗
53. 10.1073/pnas.210007711810.1073/pnas.2100077118 ↗
54. 10.1126/sciadv.adg720010.1126/sciadv.adg7200 ↗
55. 10.1021/acsnano.8b0018010.1021/acsnano.8b00180 ↗
56. 10.1126/science.adf382410.1126/science.adf3824 ↗
57. 10.1002/adma.20050135310.1002/adma.200501353 ↗
58. 10.1016/j.mee.2007.01.08910.1016/j.mee.2007.01.089 ↗
59. 10.1073/pnas.090739010610.1073/pnas.0907390106 ↗
60. 10.1002/adma.20170663710.1002/adma.201706637 ↗
61. 10.1063/1.491963010.1063/1.4919630 ↗
62. 10.1149/1.272887910.1149/1.2728879 ↗
63. 10.1016/j.mtphys.2023.10109010.1016/j.mtphys.2023.101090 ↗
64. 10.1038/nmat160610.1038/nmat1606 ↗
65. 10.1021/la701555n10.1021/la701555n ↗
66. 10.1002/adfm.20170649810.1002/adfm.201706498 ↗
67. 10.1016/j.eml.2016.02.00210.1016/j.eml.2016.02.002 ↗
68. 10.1063/1.496140710.1063/1.4961407 ↗
69. 10.1038/s41551-017-003810.1038/s41551-017-0038 ↗
70. 10.1038/s41586-023-05921-z10.1038/s41586-023-05921-z ↗
71. 10.1038/nature1649210.1038/nature16492 ↗
72. 10.1002/admi.20220147710.1002/admi.202201477 ↗
73. 10.1126/sciadv.abb057610.1126/sciadv.abb0576 ↗
74. 10.1038/ncomms426610.1038/ncomms4266 ↗
75. 10.1063/1.273436710.1063/1.2734367 ↗
76. Maire J. · Adv. Funct. Mater. · 2021
77. 10.1103/PhysRevB.79.08542910.1103/PhysRevB.79.085429 ↗
78. 10.1088/1367-2630/7/1/24110.1088/1367-2630/7/1/241 ↗
79. Landau L. D. · 2020
80. 10.1126/science.126096010.1126/science.1260960 ↗
81. 10.1002/smll.20160194710.1002/smll.201601947 ↗
82. 10.1126/science.112140110.1126/science.1121401 ↗
83. 10.1063/1.161077710.1063/1.1610777 ↗
84. 10.1364/JOSA.11.00023310.1364/JOSA.11.000233 ↗
85. 10.1021/acsnano.7b0321910.1021/acsnano.7b03219 ↗
86. 10.1063/1.239064710.1063/1.2390647 ↗
87. 10.1038/s41467-024-47405-210.1038/s41467-024-47405-2 ↗
88. 10.1021/nl404827j10.1021/nl404827j ↗
89. 10.1109/TNANO.2007.89684810.1109/TNANO.2007.896848 ↗
90. 10.1088/2053-1583/3/3/03502610.1088/2053-1583/3/3/035026 ↗
91. 10.1073/pnas.090739010610.1073/pnas.0907390106 ↗
92. Jang H. · 2016
93. 10.1038/nature0450110.1038/nature04501 ↗
94. 10.1021/acs.nanolett.7b0394410.1021/acs.nanolett.7b03944 ↗
95. 10.1021/nn506792d10.1021/nn506792d ↗
96. 10.1021/nl061846p10.1021/nl061846p ↗
97. 10.1002/smll.20230259710.1002/smll.202302597 ↗
98. 10.1063/1.488386310.1063/1.4883863 ↗
99. 10.1109/JMEMS.2015.245319110.1109/JMEMS.2015.2453191 ↗
100. 10.1002/adma.20241340410.1002/adma.202413404 ↗