Strain as a Global Factor in Stabilizing the Ferroelectric Properties of ZrO2
Source abstract
Abstract
Abstract Since the discovery of ferroelectricity in doped HfO2 and ZrO2 thin films over a decade ago, fluorite‐structured ferroelectric thin films have attracted much research attention due to their excellent scalability and complementary metal‐oxide semiconductor compatibility compared to conventional perovskite ferroelectric materials. Although various factors influencing the formation of the ferroelectric properties are identified, a clear understanding of the causes of the phase formation have been difficult to determine. In this work, ZrO2 films deposited by atomic layer deposition and chemical solution deposition have resulted in films with completely different structural properties. Regardless of these differences, a general relationship between strain and phase formation is established, leading to a more unified understanding of ferroelectric phase formation in undoped ZrO2 films, which can be applied to other fluorite‐structured films.
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Research context
OpenAlex topics: Ferroelectric and Negative Capacitance Devices · MXene and MAX Phase Materials · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
NaMLab gGmbH Noethnitzer Str. 64 a 01187 Dresden Germany
Munich University of Applied Sciences 80335 Munich Germany
Ferroelectric Memory Company 01099 Dresden Germany
Neutron Scattering Science Directorate Oak Ridge National Laboratory Oak Ridge TN 37831 USA
Institut für Werkstoffe der Elektrotechnik 2 RWTH Aachen University Sommerfeldstraße 24 52074 Aachen Germany
Fraunhofer Institut für Photonische Mikrosysteme IPMS (CNT) An der Bartlake 5 01109 Dresden Germany
School of Mathematics and Physics Queen's University Belfast Belfast Northern Ireland BT7 1NN UK
Tohoku University 2‐1‐1 Katahira, Aoba‐ku Sendai Miyagi 980–8577 Japan
Kumamoto University 2‐39‐1 Kurokami Chuo‐ku Kumamoto 860–8555 Japan
TU Dresden Noethnitzer Str. 64 01187 Dresden Germany
Funding
Bundesministerium für Bildung und Forschung · Freistaat Sachsen · Deutsche Forschungsgemeinschaft
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