DNA‐Based Nanofabrication for Nanoelectronics

Abstract This review surveys recent developments of DNA nanotechnology related to its applications in nanoelectronics industry. The authors start with a brief introduction of DNA nanostructures, followed by a focused discussion of various DNA‐based fabrication approaches that are relevant to the semiconductor industry, including DNA‐based doping of semiconductor materials, DNA‐based fabrication of nanostructures of metallic, dielectric, and semiconductor materials, and DNA‐based lithographic patterning of Si, SiO₂, metal, graphene, and polymer substrates. Examples of DNA‐templated fabrication of prototype nanoscale transistors and sensors are highlighted. Finally, major technical challenges facing the future applications of DNA nanotechnology in nanoelectronics and beyond are discussed.