Metal surface modification by ion implantation
Source abstract
Abstract
Abstract The three major beam technologies utilizing ions, electrons, and photons are playing vital roles for surface or surface-layer modifications in various industries, particularly the semiconductor industry. In these tools, ions and electrons are charged particles produced from atoms and molecules which can be used to modify the surface layers of materials in vacuum, giving properties to the surface layers that are different from those in the interior of the material.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Ion-surface interactions and analysis · Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (76)
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