Reciprocal space mapping

Abstract This review covers the recent advances in reciprocal space mapping. The experimental techniques as well as the theoretical and conceptual developments are discussed. The advantages of reciprocal space mapping over the conventional single scan X-ray scattering methods become clear from the examples presented. Extracting the additional information from mapping in reciprocal space maps has led to a deeper understanding of materials. Imperfect materials benefit enormously from these methods. Near perfect materials also indicate weak diffuse scattering that can now be interpreted in terms of defects, etc., whereas with single scans the influence is difficult to observe and separate from other features. Reciprocal space maps can be collected with both high and low angular resolution diffractometers, depending on the application, although a combination of resolutions may be necessary. It is also growing in importance in the analysis of materials using specular reflectometry. High-resolution reciprocal space mapping is not restricted to good crystalline quality. Examples of reciprocal space mapping are given for semiconductors, metals, ceramics and biological samples. For semiconductor materials, reciprocal space mapping has now become almost routine in the study of lattice relaxation in thin layers and in the assessment of the “quality” of materials. Combinations of mapping with topography and precision lattice parameter determination are also discussed. The latter part of this review discusses the advantages of three-dimensional reciprocal space mapping, which takes the analysis further. With this method the full three-dimensional shapes in reciprocal space can be studied.