Mechanical Testing of Thin Films and Small Structures

Thin films, as well as small structures, are used in many technical applications, such as semiconductor devices, information storage media, microelectromechanical systems (MEMS), and biomedical devices. The knowledge of materials properties is essential for the design and fabrication of these devices, particularly since small structures often have different properties than their bulk counterparts. This article describes the most common experimental techniques used to measure mechanical properties in small dimensions.