Platinum Nanoparticles Grown by Atomic Layer Deposition for Charge Storage Memory Applications

This paper explores platinum nanoparticle formation during the early stages of growth by atomic layer deposition. Particle size and distribution can be controlled by altering growth parameters. The particles show excellent temperature stability up to as examined by transmission electron microscopy and in situ heating. Capacitance–voltage and charge retention measurements demonstrate the memory effect in metal-oxide-semiconductor capacitors with embedded nanoparticles. The size, density, charge storage, and temperature stability of the platinum nanoparticles make them attractive for use as charge storage layers for nonvolatile memory devices.