journal article·1980-10-01

Properties of Thin Polyimide Films

L. B. Rothman

Publisher page

Abstract

Polyimide is receiving increasing interest as a possible insulator on semiconductor devices, replacing . Several commercially available polyimides have been characterized by testing films of them for electric breakdown strength, conductivity, adhesion, and other properties. The results of these tests are summarized, and the polyimides are compared to sputtered .
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Synthesis and properties of polymers

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Affiliations

IBM Data Systems Division, East Fishkill, Hopewell Junction, New York 12533

References

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