The Deterioration of a-IGZO TFTs Owing to the Copper Diffusion after the Process of the Source/Drain Metal Formation
Source abstract
Abstract
In this work, the influence of copper on amorphous type Indium-Gallium-Zinc-Oxide (a-IGZO) thin-film transistor's (TFTs) transfer curve is studied. The I D -V G curves of a-IGZO TFTs with source/drain in the structures of Cu/Ti and Ti/Al/Ti are compared. The results show that the copper greatly deteriorates the performance of the TFTs. The presence of the copper in the channel region of the device is verified by SIMS analysis. A Cu-dipping experiment is conducted by dipping devices into the solution of CuSO 4 to confirm the role of copper in the deterioration of the I D -V G curves. The hypothesis is also verified through ATLAS device simulator.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (25)
Show source-provided references
1. 10.1063/1.186276710.1063/1.1862767 ↗
2. 10.1063/1.184328610.1063/1.1843286 ↗
3. 10.1557/PROC-508-3710.1557/PROC-508-37 ↗
4. Fryer P. M. Colgan E. C. Galligan E. Graham W. Horton R. Hunt D. Latzko K. Nywening R Jenkins L. John R. Koke P. Kuo Y. Libsch F. Lien A. Lovas I. Polastre R. Rothwell M. E. Souk J. Wilson J. Wisnieff R. Wright S. , “A six-mask TFT-LCD process using copper-cate metallurgy,” SID 96 Digest, 1996, 333.10.1889/1.1985124 ↗
5. 10.1109/55.60544810.1109/55.605448 ↗
6. 10.1063/1.275372410.1063/1.2753724 ↗
7. 10.1038/nature0309010.1038/nature03090 ↗
8. 10.1002/pssr.20060004910.1002/pssr.200600049 ↗
9. 10.1002/pssr.20090322510.1002/pssr.200903225 ↗
10. 10.1063/1.350515110.1063/1.3505151 ↗
11. 10.1063/1.34871610.1063/1.348716 ↗
12. 10.1063/1.35180910.1063/1.351809 ↗
13. 10.1109/JDT.2009.202149010.1109/JDT.2009.2021490 ↗
14. 10.1016/S0040-6090(97)01077-810.1016/S0040-6090(97)01077-8 ↗
15. 10.1109/JDT.2009.203455910.1109/JDT.2009.2034559 ↗
16. 10.1143/JJAP.30.70310.1143/JJAP.30.703 ↗
17. 10.1063/1.274279010.1063/1.2742790 ↗
18. 10.1149/1.306012910.1149/1.3060129 ↗
19. 10.1063/1.357064110.1063/1.3570641 ↗
20. 10.1557/PROC-336-82310.1557/PROC-336-823 ↗
21. 10.1016/j.tsf.2005.08.26810.1016/j.tsf.2005.08.268 ↗
22. 10.1063/1.285746310.1063/1.2857463 ↗
23. 10.1103/PhysRevLett.81.124310.1103/PhysRevLett.81.1243 ↗
24. 10.1063/1.171332210.1063/1.1713322 ↗
25. 10.1016/0038-1101(83)90159-410.1016/0038-1101(83)90159-4 ↗