journal article·1999-04

Reverse short and narrow channel effects in n and p transistors: quantification of the enhanced diffusion and the gate oxide thickness increase

Bernard Leroy, Paul Henri Albarede, Patrick Martin

Journal of Non-Crystalline Solids· Volume 245· Issue 1-3
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Semiconductor materials and devices · Advancements in Semiconductor Devices and Circuit Design · Integrated Circuits and Semiconductor Failure Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (20)

Show source-provided references
1. S.M. Sze, Physics of Semiconductor Devices, Wiley, New York, 1981, p.459
2. Huang · IEEE Trans. Electron. Dev. · 1984 · ED/31 · 188910.1109/T-ED.1984.21806 ↗
3. M. Orlowski, C. Mazure, F. Lau, IEDM Tech. Dig. (1987) 63210.1109/IEDM.1987.191507 ↗
4. Lu · IEEE Electron. Dev. Lett. · 1989 · 10 · 44610.1109/55.43095 ↗
5. Mazure · IEEE Electron. Dev. Lett. · 1989 · 10 · 55610.1109/55.43138 ↗
6. Guo · Jpn. J. Appl. Phys. · 1994 · 33 · 63010.1143/JJAP.33.630 ↗
7. Chang · IEEE Electron. Dev. Lett. · 1994 · 15 · 43710.1109/55.334659 ↗
8. Chung · IEEE Trans. Electron. Dev. · 1997 · 44 · 222010.1109/16.644641 ↗
9. Awaji · Jpn. J. Appl. Phys. · 1996 · L35 · 6710.1143/JJAP.35.L67 ↗
10. Ourmazd · Appl. Phys. Lett. · 1988 · 53 · 74310.1063/1.100559 ↗
11. Mikkelsen · Appl. Phys. Lett. · 1982 · 41 · 87110.1063/1.93681 ↗
12. I. Delidais, PhD thesis, Paris, 1991
13. Mikkelsen · Appl. Phys. Lett. · 1982 · 40 · 33610.1063/1.93089 ↗
14. Ourmazd · J. Appl. Phys. · 1984 · 56 · 167010.1063/1.334156 ↗
15. Heck · J. Appl. Phys. · 1983 · 54 · 573910.1063/1.331796 ↗
16. Nakashima · J. Electrochem. Soc. · 1996 · 143 · 24410.1149/1.1836416 ↗
17. Gosele · Appl. Phys. Lett. · 1985 · 67 · 24110.1063/1.114680 ↗
18. Takahashi · Appl. Phys. Lett. · 1994 · 65 · 298710.1063/1.112485 ↗
19. Han · J. Appl. Phys. · 1998 · 83 · 217210.1063/1.366955 ↗
20. Denison · J. Vac. Sci. Technol. · 1996 · A14 · 112410.1116/1.580280 ↗