High rate deposition of a-Si:H films for optoelectronic detectors by VHF-GD
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Ga2O3 and related materials · Silicon Nanostructures and Photoluminescence
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References (6)
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1. Curtins · 1987 · Vol. 95 · 249
2. Favre · J. of Non-Cryst. Sol. · 1987 · 97&98 · 73110.1016/0022-3093(87)90172-4 ↗
3. Shah · Proceedings of the 20th IEEE Photovoltaic Spec. Conf. · 1988
4. Carlson · RCA review · 1977 · 38 · 211
5. Kaneko · 1984 · Vol. 21 · 139
6. Kempter · 1985 · 49 · 429