Plasma-enhanced silicon nitride deposition for thin film transistor applications
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · ZnO doping and properties
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References (12)
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7. Quinn · 1993
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11. Quinn · 1994 · 2 · 599
12. Quinn · 1994 · Vol. 24 · 581