journal article·1996-05

Low temperature fabrication of APCVD a-Si thin film transistors with ion doped layer

Kyung Ha Lee, Jae Ho Yoo, Byeong Yeon Moon, Jae Hoon Jung, Jin Jang, S.M. Pietruszko, Min Koo Han, Hyuk Ryeol Park

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence

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References (9)

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8. Jackson · Phys. Rev. · 1982 · B25 · 555910.1103/PhysRevB.25.5559 ↗
9. Yoshida · Jpn. J. Appl. Phys. · 1993 · 32 · 214710.1143/JJAP.32.2147 ↗