Fabrication and performance of thin film transistors, TFTs, incorporating doped μc-Si source and drain contacts, and boron-compensated μc-Si channel layers
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (10)
Show source-provided references
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9. Lucovsky · J. Vac. Sci. Technol. · 1992 · A10 · 202510.1116/1.578019 ↗
10. Chen · J. Vac. Sci. Technol. · 1992 · A10 · 87410.1116/1.577687 ↗