Photoresist-free fabrication process for a-Si:H thin film transistors
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Optical Coatings and Gratings · Nanofabrication and Lithography Techniques
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References (3)
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1. Mikami · IEEE Trans. Electron Devices · 1994 · 41 · 30610.1109/16.275214 ↗
2. Gleskova · IEEE Electron Device Lett. · 1995 · 16 · 41810.1109/55.464803 ↗
3. Gleskova · Mater. Res. Soc. Symp. Proc. · 1997 · 46710.1557/PROC-467-869 ↗