Molybdenum Silicide Superconducting Nanowire Single-Photon Detectors on Lithium Niobate Waveguides

We demonstrate a molybdenum silicide superconducting nanowire single-photon detector heterogeneously integrated onto a thin-film lithium niobate waveguide. The detector achieves approximately 50% on-chip detection efficiency at 1550 nm with a jitter of 82 ps when measured at 0.78 K. This demonstration showcases the integration of an amorphous superconductor utilizing conventional fabrication processes without strict cooling and substrate requirements. This paves the way for the integration of additional superconducting electronic components, potentially realizing the full promise of integrated quantum photonic circuits.