Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems
Abstract
Research context
OpenAlex topics: Mechanical and Optical Resonators · Photonic and Optical Devices · Advanced MEMS and NEMS Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and BIST, Campus UAB, Bellaterra, 08193 Barcelona, Spain
MIND-IN2UB, Departament d’Electrònica, Facultat de Física, Universitat de Barcelona, Martí i Franquès 1, 08028 Barcelona, Spain
NEST, Istituto Nanoscienze − CNR and Scuola Normale Superiore, Piazza San Silvestro 12, I-56127, Pisa, Italy
Nanophotonics Technology Center, Universitat Politècnica de Valencia, Building 8F, Camino de Vera s/n, 46022, Valencia, Spain
VTT Technical Research Centre of Finland Ltd., P.O. Box 1000, FI-02044 VTT, Espoo, Finland
Catalan Institute for Research and Advances Studies ICREA, 08010 Barcelona, Spain
Funding
Generalitat Valenciana · Ministerio de Ciencia e Innovaci?n · H2020 Future and Emerging Technologies · Secretar?a de Estado de Investigaci?n, Desarrollo e Innovaci?n · Generalitat de Catalunya