A self-focused multichannel electron beam source for annealing of ion-implanted semiconductors
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OpenAlex topics: Semiconductor materials and devices · Semiconductor Quantum Structures and Devices · Integrated Circuits and Semiconductor Failure Analysis
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References (8)
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1. Lue · Vacuum · 1982 · 32 · 71310.1016/0042-207X(82)93841-6 ↗
2. 1982
3. Greenwald · J appl Phys · 1979 · 50 · 785
4. Feist · 1968 · 3
5. Merli · Optik · 1980 · 56 · 2056
6. Lue · J appl Phys · 1982 · 53 · 98410.1063/1.330578 ↗
7. The annealing of phosphorous ion implanted cadmium telluride by a pulsed electron beam10.1109/T-ED.1985.22273 ↗
8. Recent approaches on annealing and doping in CuInS2