Synthesis of β-FeSi2/Si heterojunctions for photovoltaic applications by unbalanced magnetron sputtering

Abstract We report here the possibility of the growth of semiconducting FeSi 2 layers on Si(100) substrates by depositing iron with unbalanced magnetron sputtering. The originality of the study is the achievement of heterojunction without any further treatment of the deposited films. Pure iron is deposited on Si(100) substrates with unbalanced magnetron sputtering for the production of β-FeSi 2 /Si heterojunctions. Prior to coating process the substrates are cleaned with neutral molecular source. Microstructure of β-FeSi 2 films were investigated by X-Ray Diffraction analysis and Raman Spectroscopy. Dark current–voltage characteristic of the deposited coatings showed a rectifying behavior for the β-FeSi 2 /Si heterojuctions. Open-circuit voltage ( V oc ) and short-circuit current density ( J sc ) were measured under 100 mWcm − 2 illumination and a V oc of 360 mV and J sc of 180 μAcm − 2 were measured. The illumination of the silicon side gave higher photosensitivity than the illumination of the iron silicide side.