journal article·2025-12-23

Ultralow-Power Tuning and Nonvolatile Operation on a Hybrid Silicon Nitride/Barium Titanate Integrated Photonics Platform

Xin Wang, Jie Tu, Min Sun, Wenfeng Zhou, Zhibo Cheng, Yikai Su, Binbin Chen, Yong Zhang

ACS Nano· Volume 19· Issue 50
Publisher page

Abstract

The information era imposes increasing demands on speed and energy efficiency, pushing conventional electronics to its physical limits. Silicon photonics offers a promising path forward, particularly when integrated with electro-optic ferroelectric materials, which can overcome fundamental bottlenecks in data rate and power consumption. With pronounced electro-optic activity and controllable ferroelectric domain orientation, thin-film barium titanate (BTO) presents a promising platform for advanced photonic integration. Here, we fabricate epitaxial BTO films on MgO substrates and use precise structural design to realize silicon nitride-BTO (SiN-BTO) hybrid microring devices. Through co-optimization of material synthesis and device architecture, we achieve a record-low power consumption of 0.0015 nW/pm─among the best reported values for electro-optic tuners and exhibiting the highest effective electro-optic coefficient for BTO-on-MgO platforms. Furthermore, we demonstrate nonvolatile tuning enabled by ferroelectric domain control, achieving an eight-level photonic device stable for over 12 h and optically readable switching energy of 0.191 pJ. This work establishes a versatile platform integrating the multifunctionality of ferroelectric BTO with energy-efficient photonic operation, providing a foundation for scalable circuits in next-generation communication, sensing, and computing systems.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Ferroelectric and Piezoelectric Materials · Photorefractive and Nonlinear Optics · Acoustic Wave Resonator Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

State Key Lab of Photonics and Communications, Department of Electron Engineering

Shanghai Jiao Tong University

Key Laboratory of Polar Materials and Devices (MOE) and Department of Electronics

East China Normal University

Funding

National Key Research and Development Program of China · National Natural Science Foundation of China

References (49)

Show source-provided references
1. 10.1126/sciadv.aau575910.1126/sciadv.aau5759 ↗
2. 10.1038/s41586-021-04362-w10.1038/s41586-021-04362-w ↗
3. 10.1038/s41566-020-00754-y10.1038/s41566-020-00754-y ↗
4. 10.1021/acsnano.0c0975810.1021/acsnano.0c09758 ↗
5. 10.1021/acsnano.1c0952610.1021/acsnano.1c09526 ↗
6. 10.1038/s41467-025-61536-010.1038/s41467-025-61536-0 ↗
7. 10.1002/lpor.20240109210.1002/lpor.202401092 ↗
8. 10.1038/s41467-020-16812-610.1038/s41467-020-16812-6 ↗
9. 10.1002/lpor.20220024810.1002/lpor.202200248 ↗
10. 10.1038/s41566-023-01161-910.1038/s41566-023-01161-9 ↗
11. 10.1021/acsphotonics.9b0055810.1021/acsphotonics.9b00558 ↗
12. 10.1038/s41563-018-0208-010.1038/s41563-018-0208-0 ↗
13. 10.1109/JLT.2015.251028210.1109/JLT.2015.2510282 ↗
14. 10.1109/JSTQE.2024.340538710.1109/JSTQE.2024.3405387 ↗
15. 10.1109/JQE.2017.271822210.1109/JQE.2017.2718222 ↗
16. 10.1038/s41563-020-0725-510.1038/s41563-020-0725-5 ↗
17. 10.1109/JLT.2023.326006410.1109/JLT.2023.3260064 ↗
18. 10.1002/adfm.20231557910.1002/adfm.202315579 ↗
19. 10.1002/adom.20230305810.1002/adom.202303058 ↗
20. 10.1088/1361-6528/aa53c210.1088/1361-6528/aa53c2 ↗
21. 10.1038/s41566-022-01003-010.1038/s41566-022-01003-0 ↗
22. 10.1038/s41566-023-01217-w10.1038/s41566-023-01217-w ↗
23. 10.1021/acsnano.4c1189810.1021/acsnano.4c11898 ↗
24. 10.1364/OE.22.01048710.1364/OE.22.010487 ↗
25. 10.1038/s41467-020-19608-w10.1038/s41467-020-19608-w ↗
26. 10.1126/sciadv.adp777910.1126/sciadv.adp7779 ↗
27. 10.1021/acsnano.4c0034010.1021/acsnano.4c00340 ↗
28. 10.1038/s41586-022-04415-810.1038/s41586-022-04415-8 ↗
29. 10.1021/acsami.2c0906210.1021/acsami.2c09062 ↗
30. Hudec R. · 2009
31. 10.1021/acsami.1c1146310.1021/acsami.1c11463 ↗
32. 10.1063/1.219423110.1063/1.2194231 ↗
33. 10.1002/adom.20200062310.1002/adom.202000623 ↗
34. 10.1016/j.apsusc.2005.02.14610.1016/j.apsusc.2005.02.146 ↗
35. 10.1063/1.240498210.1063/1.2404982 ↗
36. 10.1103/PhysRevMaterials.5.03520110.1103/PhysRevMaterials.5.035201 ↗
37. 10.1111/jace.1729110.1111/jace.17291 ↗
38. 10.1038/ncomms500810.1038/ncomms5008 ↗
39. 10.1364/OE.27.02858810.1364/OE.27.028588 ↗
40. 10.1364/OE.26.00317410.1364/OE.26.003174 ↗
41. 10.1002/lpor.20230036010.1002/lpor.202300360 ↗
42. 10.1021/acsphotonics.5c0071510.1021/acsphotonics.5c00715 ↗
43. 10.1002/adom.20250018610.1002/adom.202500186 ↗
44. 10.1002/adma.20241851010.1002/adma.202418510 ↗
45. 10.1038/s41565-022-01153-w10.1038/s41565-022-01153-w ↗
46. 10.1038/s41566-024-01549-110.1038/s41566-024-01549-1 ↗
47. 10.1038/s41467-024-55528-910.1038/s41467-024-55528-9 ↗
48. 10.1038/s41467-020-20365-z10.1038/s41467-020-20365-z ↗
49. 10.1038/s41586-019-1157-810.1038/s41586-019-1157-8 ↗