Microstructural characterization of donor-doped lead zirconate titanate films prepared by sol–gel processing

Abstract Lanthanum and niobium-doped lead zirconate titanate, Pb(Zr,Ti)O3, (PZT) thin films were prepared on Pt/Ti/SiO2/Si substrates by sol–gel processing. Films have a Zr/Ti ratio of 52:48 and tetragonal perovskite phase structure. The influence of donor dopants on the morphology, texture and defects of PZT films was studied using X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, breakdown field strength and fatigue. Donor doping of PZT films results in increased breakdown field strength and improved fatigue properties. These originate from (i) the reduction of texture in the [111] and increase in the texture in [100]; (ii) lower porosity, smaller grain size and smoother surfaces; (iii) granular grain structure; and (iv) reduction in the oxygen vacancy concentration in the films.