Three-Dimensional Silicon Electronic Systems Fabricated by Compressive Buckling Process
Abstract
Research context
OpenAlex topics: Advanced Materials and Mechanics · Advanced Sensor and Energy Harvesting Materials · Modular Robots and Swarm Intelligence
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Affiliations
Departments of Materials Science and Engineering, Biomedical Engineering, Chemistry, Neurological Surgery, Mechanical Engineering, Electrical Engineering and Computer Science, Simpson Querrey Institute & Feinberg Medical School, Center for Bio-Integrated Electronics, Northwestern University, Evanston, Illinois 60208, United States
Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States
Department of Civil and Environmental Engineering, Mechanical Engineering, and Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States
AML, Department of Engineering Mechanics, Center for Mechanics and Materials, Tsinghua University, Beijing 100084, China
Center for Mechanics and Materials, Center for Flexible Electronics Technology, AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China
Department of Electronics Convergence Engineering, Kwangwoon University, Seoul 01897, Republic of Korea
Division of Materials Science and Engineering, Hanyang University, Seoul 04763, Republic of Korea
Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
Department of Mechanical Engineering, Ajou University, Suwon, 443-749, Republic of Korea
Weldon School of Biomedical Engineering, School of Mechanical Engineering, The Center for Implantable Devices, and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States
School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Republic of Korea
Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu 42988, Republic of Korea
Funding
Division of Industrial Innovation and Partnerships · National Research Foundation of Korea · National Institute of Biomedical Imaging and Bioengineering · Division of Civil, Mechanical and Manufacturing Innovation · National Natural Science Foundation of China