journal article·2019-02-26

Enhanced Second Harmonic Generation from Ferroelectric HfO2-Based Hybrid Metasurfaces

Jun Qin, Fei Huang, Xinyue Li, Longjiang Deng, Tongtong Kang, Andrey Markov, Fuyong Yue, Yiqin Chen, Xinglin Wen, Sheng Liu, Qihua Xiong, Sergey Semin, Theo Rasing, Daniele Modotto, Roberto Morandotti, Jialiang Xu, Huigao Duan, Lei Bi

ACS Nano· Volume 13· Issue 2
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Abstract

Integrated nonlinear metasurfaces leading to high-efficiency optical second harmonic generation (SHG) are highly desirable for optical sensing, imaging, and quantum photonic systems. Compared to traditional metal-only metasurfaces, their hybrid counterparts, where a noncentrosymmetric nonlinear photonic material is incorporated in the near-field of a metasurface, can significantly boost SHG efficiency. However, it is difficult to integrate such devices on-chip due to material incompatibilities, thickness scaling challenges, and the narrow band gaps of nonlinear optical materials. Here, we demonstrate significantly enhanced SHG in on-chip integrated metasurfaces by using nanometer thin films of ferroelectric Y:HfO2. This material has the merit of CMOS compatibility, ultraviolet transparency up to 250 nm, and significant scalability down to sub-10 nm when deposited on silicon. We observe a 20-fold magnitude enhancement of the SHG intensity from the hybrid metasurface compared to a bare ferroelectric HfO2 thin film. Moreover, a 3-fold SHG enhancement is observed from the hybrid metasurface compared to a control structure using nonferroelectric HfO2, demonstrating a major contribution to the SHG signal from ferroelectric Y:HfO2. The effective second-order nonlinear optical coefficient χ(2) of Y:HfO2 is determined to be 6.0 ± 0.5 pm/V, which is comparable to other complex nonlinear photonic oxide materials. Our work provides a general pathway to build an efficient on-chip nanophotonic nonlinear light source for SHG using ferroelectric HfO2 thin films.
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Research context

OpenAlex topics: Photonic and Optical Devices · Plasmonic and Surface Plasmon Research · Metamaterials and Metasurfaces Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

National Engineering Center of Electromagnetic Radiation Wave Control Materials, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China

School of Materials Science and Engineering, National Institute for Advanced Materials, Nankai University, Tongyan Road 38, Tianjin 300350, P. R. China

Institute for Molecules and Materials (IMM), Radboud University, Heyendaalseweg 135, 6525AJ Nijmegen, The Netherlands

INRS-Énergie, Matériaux et Télécommunications, Varennes, QC G1K 9A9, Canada

College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China

Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, Singapore 637371

Dipartimento di Ingegneria dell’Informazione, Università di Brescia, via Branze 38, 25123 Brescia, Italy

ITMO University, St. Petersburg 197101, Russia

Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu 610054, China

Funding

State Administration of Foreign Experts Affairs · Ministry of Science and Technology of the People's Republic of China · Ministry of Education of the People's Republic of China · Koninklijke Nederlandse Akademie van Wetenschappen · Natural Sciences and Engineering Research Council of Canada · National Natural Science Foundation of China · Nederlandse Organisatie voor Wetenschappelijk Onderzoek · Central Committee of the Communist Party of China

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