journal article·2021-01-26Open access

Narrower Nanoribbon Biosensors Fabricated by Chemical Lift-off Lithography Show Higher Sensitivity

Chuanzhen Zhao, Qingzhou Liu, Kevin M. Cheung, Wenfei Liu, Qing Yang, Xiaobin Xu, Tianxing Man, Paul S. Weiss, Chongwu Zhou, Anne M. Andrews

ACS Nano· Volume 15· Issue 1

Abstract

Wafer-scale nanoribbon field-effect transistor (FET) biosensors fabricated by straightforward top-down processes are demonstrated as sensing platforms with high sensitivity to a broad range of biological targets. Nanoribbons with 350 nm widths (700 nm pitch) were patterned by chemical lift-off lithography using high-throughput, low-cost commercial digital versatile disks (DVDs) as masters. Lift-off lithography was also used to pattern ribbons with 2 μm or 20 μm widths (4 or 40 μm pitches, respectively) using masters fabricated by photolithography. For all widths, highly aligned, quasi-one-dimensional (1D) ribbon arrays were produced over centimeter length scales by sputtering to deposit 20 nm thin-film In2O3 as the semiconductor. Compared to 20 μm wide microribbons, FET sensors with 350 nm wide nanoribbons showed higher sensitivity to pH over a broad range (pH 5 to 10). Nanoribbon FETs functionalized with a serotonin-specific aptamer demonstrated larger responses to equimolar serotonin in high ionic strength buffer than those of microribbon FETs. Field-effect transistors with 350 nm wide nanoribbons functionalized with single-stranded DNA showed greater sensitivity to detecting complementary DNA hybridization vs 20 μm microribbon FETs. In all, we illustrate facile fabrication and use of large-area, uniform In2O3 nanoribbon FETs for ion, small-molecule, and oligonucleotide detection where higher surface-to-volume ratios translate to better detection sensitivities.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Nanowire Synthesis and Applications · Nanofabrication and Lithography Techniques · Analytical Chemistry and Sensors

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Chemistry and Biochemistry, University of California, Los Angeles, Los Angeles, California 90095, United States

California NanoSystems Institute, University of California, Los Angeles, Los Angeles, California 90095, United States

Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, California 90089, United States

Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, Los Angeles, California 90095, United States

Department of Bioengineering, University of California, Los Angeles, Los Angeles, California 90095, United States

Department of Materials Science and Engineering, University of California, Los Angeles, Los Angeles, California 90095, United States

Ming Hsieh Department of Electrical Engineering, University of Southern California, Los Angeles, California 90089, United States

Department of Psychiatry and Biobehavioral Sciences, Semel Institute for Neuroscience and Human Behavior, and Hatos Center for Neuropharmacology, University of California, Los Angeles, Los Angeles, California 90095, United States

Funding

King Abdulaziz City for Science and Technology · National Institute on Drug Abuse · Division of Civil, Mechanical and Manufacturing Innovation

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