journal article·2010-01-26

Rapid Nanoimprinting and Excellent Piezoresponse of Polymeric Ferroelectric Nanostructures

Yuanming Liu, Dirk N. Weiss, Jiangyu Li

ACS Nano· Volume 4· Issue 1
Publisher page

Abstract

Nanostructured ferroelectric patterns are promising for a wide range of applications, including sensing and actuation, data storage, photonics, spintronics, and energy conversion and storage. In this work, a rapid nanoimprinting technique is developed to pattern ferroelectric poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] copolymers in just 3 min, which exhibit excellent ferroelectricity and piezoresponse without any post-imprinting annealing. The effects of imprinting conditions have been thoroughly investigated, and the optimal imprinting parameters for excellent pattern transfer have been identified. The application of the imprinted polymeric patterns as a ferroelectric nonvolatile memory for data storage has also been demonstrated and discussed.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Dielectric materials and actuators · Ferroelectric and Piezoelectric Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Mechanical Engineering, University of Washington, Seattle, Washington 98195-2600

Washington Technology Center, Seattle, Washington 98195-2140

References (48)

Show source-provided references
1. Zhang Q. M. · Science · 1998 · 280 · 210110.1126/science.280.5372.2101 ↗
2. Li J. Y. · Nat. Mater. · 2005 · 4 · 77610.1038/nmat1485 ↗
3. Hu Z. J. · Nat. Mater. · 2009 · 8 · 6210.1038/nmat2339 ↗
4. Scott J. F. · Science · 2007 · 315 · 95410.1126/science.1129564 ↗
5. Liao L. · ACS Nano · 2009 · 3 · 70010.1021/nn800808s ↗
6. Clemens S. · Nanotechnology · 2009 · 20 · 07530510.1088/0957-4484/20/7/075305 ↗
7. Scott J. F. · Ferroelectrics · 2003 · 286 · 94510.1080/00150190390206400 ↗
8. Chu Y. H. · Nat. Mater. · 2008 · 7 · 47810.1038/nmat2184 ↗
9. Li J. Y. · Appl. Phys. Lett. · 2007 · 90 · 13290110.1063/1.2716847 ↗
10. Chu B. J. · Science · 2006 · 313 · 33410.1126/science.1127798 ↗
11. Li D. B. · Annu. Rev. Mater. Res. · 2008 · 38 · 35110.1146/annurev.matsci.37.052506.084303 ↗
12. Chang L. W. · Appl. Phys. Lett. · 2008 · 93 · 13290410.1063/1.2990760 ↗
13. Nagarajan V. · Nanotechnology · 2006 · 17 · 33810.1088/0957-4484/17/1/058 ↗
14. Hambe M. · Nanotechnology · 2008 · 19 · 17530210.1088/0957-4484/19/17/175302 ↗
15. Ferris J. H. · Appl. Phys. Lett. · 2004 · 84 · 77410.1063/1.1644327 ↗
16. Seraji S. · Adv. Mater. · 2000 · 12 · 142110.1002/1521-4095(200010)12:19<1421::AID-ADMA1421>3.0.CO;2-4 ↗
17. Nonomura H. · Appl. Phys. Lett. · 2005 · 86 · 16310610.1063/1.1899748 ↗
18. Wu Z. Q. · Nanotechnology · 2007 · 18 · 32570310.1088/0957-4484/18/32/325703 ↗
19. Li J. Y. · J. Appl. Phys. · 2008 · 104 · 09430210.1063/1.3000658 ↗
20. Chou S. Y. · J. Vac. Sci. Technol., B · 1996 · 14 · 412910.1116/1.588605 ↗
21. Ding Y. F. · Adv. Funct. Mater. · 2008 · 18 · 185410.1002/adfm.200701402 ↗
22. Ahn S. H. · ACS Nano · 2009 · 3 · 230410.1021/nn9003633 ↗
23. Harnagea C. · Appl. Phys. Lett. · 2003 · 83 · 182710.1063/1.1606870 ↗
24. Hsieh K. C. · J. Vac. Sci. Technol., B · 2006 · 24 · 323410.1116/1.2395958 ↗
25. Hu Z. J. · Nano Lett. · 2005 · 5 · 173810.1021/nl051097w ↗
26. Zhang L. · Appl. Phys. Lett. · 2007 · 91 · 17290610.1063/1.2800803 ↗
27. Chen H. L. · Nanotechnology · 2008 · 19 · 43530410.1088/0957-4484/19/43/435304 ↗
28. Kang S. J. · Adv. Mater. · 2007 · 19 · 58110.1002/adma.200601474 ↗
29. Bune A. V. · Nature · 1998 · 391 · 87410.1038/36069 ↗
30. Omote K. · J. Appl. Phys. · 1997 · 81 · 276010.1063/1.364300 ↗
31. Nishio T. · Nanotechnology · 2008 · 19 · 03520210.1088/0957-4484/19/03/035202 ↗
32. Lum P. · IEEE Trans. Ultrason. Ferroelectr. Freq. Control · 1996 · 43 · 53610.1109/58.503713 ↗
33. Kim D. W. · Integr. Ferroelectr. · 2008 · 98 · 12110.1080/10584580802092548 ↗
34. Li C. Y. · J. Microelectromech. Syst. · 2008 · 17 · 33410.1109/JMEMS.2007.911375 ↗
35. Austin M. D. · Appl. Phys. Lett. · 2004 · 84 · 529910.1063/1.1766071 ↗
36. Maury P. · Adv. Funct. Mater. · 2005 · 15 · 45110.1002/adfm.200400284 ↗
37. Li J. Y. · Appl. Phys. Lett. · 2005 · 87 · 21311610.1063/1.2136220 ↗
38. Li J. Y. · J. Mech. Phys. Solids · 2006 · 54 · 216210.1016/j.jmps.2006.03.008 ↗
39. Kalinin S. V. · Phys. Rev. B · 2002 · 65 · 12540810.1103/PhysRevB.65.125408 ↗
40. Kalinin S. V. · IEEE Trans. Ultrason. Ferroelectr. Freq. Control. · 2006 · 53 · 222610.1109/TUFFC.2006.169 ↗
41. Gruverman A. · J. Mater. Sci. · 2006 · 41 · 10710.1007/s10853-005-5946-0 ↗
42. Rodriguez B. J. · Nanotechnology · 2007 · 18 · 47550410.1088/0957-4484/18/47/475504 ↗
43. Jesse S. · Appl. Phys. Lett. · 2006 · 88 · 06290810.1063/1.2172216 ↗
44. Hong S. · J. Appl. Phys. · 2001 · 89 · 137710.1063/1.1331654 ↗
45. Kalinin S. V. · Adv. Mater. · 2004 · 16 · 79510.1002/adma.200305702 ↗
46. Li D. B. · J. Mater. Res. · 2006 · 21 · 93510.1557/jmr.2006.0107 ↗
47. Rankin C. · ACS Nano · 2007 · 1 · 23410.1021/nn7000728 ↗
48. Gao H. · Nano Lett. · 2006 · 6 · 243810.1021/nl0615118 ↗