journal article·2025-01-28Open access

Pick-and-Place Transfer of Arbitrary-Metal Electrodes for van der Waals Device Fabrication

Kaijian Xing, Daniel McEwen, Yuefeng Yin, Weiyao Zhao, Abdulhakim Bake, David Cortie, Jingying Liu, Thi-Hai-Yen Vu, Yi-Hsun Chen, James Hone, Alastair Stacey, Mark T. Edmonds, Nikhil V. Medhekar, Kenji Watanabe, Takashi Taniguchi, Qingdong Ou, Dong-Chen Qi, Michael S. Fuhrer

ACS Nano· Volume 19· Issue 3

Abstract

Van der Waals electrode integration is a promising strategy to create nearly perfect interfaces between metals and 2D materials, with advantages such as eliminating Fermi-level pinning and reducing contact resistance. However, the lack of a simple, generalizable pick-and-place transfer technology has greatly hampered the wide use of this technique. We demonstrate the pick-and-place transfer of prefabricated electrodes from reusable polished hydrogenated diamond substrates without the use of any sacrificial layers due to the inherent low-energy and dangling-bond-free nature of the hydrogenated diamond surface. The technique enables transfer of arbitrary-metal electrodes and an electrode array, as demonstrated by successful transfer of eight different elemental metals with work functions ranging from 4.22 to 5.65 eV. We also demonstrate the electrode array transfer for large-scale device fabrication. The mechanical transfer of metal electrodes from diamond to van der Waals materials creates atomically smooth interfaces with no interstitial impurities or disorder, as observed with cross-section high-resolution transmission electron microscopy and energy-dispersive X-ray spectroscopy. As a demonstration of its device application, we use the diamond transfer technique to create metal contacts to monolayer transition metal dichalcogenide semiconductors with high-work-function Pd, low-work-function Ti, and semimetal Bi to create n - and p -type field-effect transistors with low Schottky barrier heights. We also extend this technology to air-sensitive materials (trilayer 1T’ WTe 2 ) and other applications such as ambipolar transistors, Schottky diodes, and optoelectronics. This highly reliable and reproducible technology paves the way for new device architectures and high-performance devices.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: 2D Materials and Applications · Graphene research and applications · MXene and MAX Phase Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Macau University of Science and Technology Zhuhai MUST Science and Technology Research Institute, Zhuhai 519099, China

School of Physics and Astronomy, Monash University, Clayton, Victoria 3800, Australia

Australian Research Council Centre of Excellence in Future Low-Energy Electronics Technologies (FLEET), Monash University, Clayton, Victoria 3800, Australia

Department of Materials Science & Engineering, Monash University, Clayton, Victoria 3800, Australia

Institute for Superconducting and Electric Materials (ISEM), University of Wollongong, Wollongong, NSW 2522, Australia

School of Physics, University of Wollongong, Wollongong, NSW 2522, Australia

The Australia Nuclear Science and Technology Organisation (ANSTO), Lucas Heights, NSW 2234, Australia

Department of Mechanical Engineering, Columbia University, New York, New York 10027, United States

School of Science, RMIT University, Melbourne, Victoria 3000, Australia

Princeton Plasma Physics Laboratory, 100 Stellarator Road, Princeton, New Jersey 08540, United States

Research Center for Electronic and Optical Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan

Research Center for Materials Nanoarchitectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan

Macao Institute of Materials Science and Engineering (MIMSE), Faculty of Innovation Engineering, Macau University of Science and Technology, Taipa, Macao 999078, China

Centre for Materials Science, Queensland University of Technology, Brisbane, Queensland 4001, Australia

School of Chemistry and Physics, Queensland University of Technology, Brisbane, Queensland 4001, Australia

Funding

Ministry of Education, Culture, Sports, Science and Technology · Centre of Excellence in Future Low-Energy Electronics Technologies, Australian Research Council · Australian Research Council · Japan Society for the Promotion of Science · Fundo para o Desenvolvimento das Ci?ncias e da Tecnologia · Queensland University of Technology · National Natural Science Foundation of China

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